World MEMS Equipment and Materials Market

World MEMS Equipment and Materials Market

MEMS: A HEALTHY BUSINESS

The MEMS sector will see strong growth for the coming years because of many new products enabled by MEMS devices.

Consumer applications (such as Wii, iPhone, PicoP picoprojector …) will be major contributors to the 17% average growth for the next five years.

The automotive market will have modest growth of a few % while wireless telecommunications and bio medical will experience double digit growth. This healthy business will drive the need for production tools (etching, litho …) and materials (wafers, chemistry …) as more and more MEMS makers will ramp up production.

Among the most dramatic MEMS developments, the US regulation for tire pressure sensors will boost the production to 7 million in unit shipments. In 2008, production for Si microphones will begin in earnest. Consumer demand will boost accelerometers and gyroscopes (motion sensing in game controllers, optical stabilization systems …).

Cost decreases for micro bolometers should open the way to new markets (thermography, automotive). Micro displays for pico projectors should reach millions of units over the next years.

A UNIQUE REPORT ON MEMS DEVICES, EQUIPEMENT AND MATERIALS

The “World MEMS Equipment & Materials Market 2008” (“WMEM 08”) is the new Yole report describing the trends and opportunities for equipment and materials for MEMS production.

This report provides an analysis of the different MEMS devices: IJ heads, pressure sensors, Si microphones, accelerometers, gyroscopes, MOEMS, microbolometers, microdisplays, microfluidics for research, diagnostics and drug delivery, RF MEMS, micro tips & probes, micro fuel cells and emerging MEMS devices.

For every MEMS device, a description is given for market outlook, key players, new applications and manufacturing trends.

WMEM 08 is giving precise market data for MEMS devices but also for wafers, production tools and MEMS specific chemistry for MEMS manufacturing.

Market share and competitive analysis for mems vendors is presented.

EQUIPMENT FOR MEMS: A $680M BY 2012

The MEMS production tool market will reach $680M by 2012 with most of the market value being for Front End equipment (see Fig. 1). MEMS equipment sales will undergo a 17% average annual growth until 2012. The WMEM 08 report provides in-depth analysis for the different types of tools for MEMS production:

• Etching
  
  
• Wafer bonding
  
  
• Inspection & Measurement
  
  
• Lithography
  
  
• Deposition
  
  
• Thermal processing
  
  
• Cleaning
  
  
• Testing
  
  
• Thinning
  
  
• Assembly
  
  
• Dicing
  
  
• Wafer level testing

Although MEMS processing uses standard IC processes, there are very specific steps which are covered in the WMEM 08 report.

For example, they are:

• Deep Reactive Ion Etching: mostly used for inertial MEMS, but now also for IJ heads and micro actuators. Deep etching tools are one of the most promising opportunities for MEMS production.
  
  
• Sacrificial Layer Etching: usually, wet etching is used, but dry etch technologies are gaining momentum (XeF2, vapor HF).
  
  
• Dual-side alignment: back-side etching of pressure sensors, wafer level packaging.
  
  
• Thick resist coating.

MATERIALS FOR MEMS: A $603M BY 2012

Materials for MEMS will be a $603M market in 2012. Regarding wafer processing, 4.5M 6” eq wafers will be processed in 2008 and more than 6M by 2012. MEMS production will mostly shift to 6” wafers with increasing use of 8”, despite smaller and smaller MEMS dies. SOI wafer demand will experience high growth (14% over 2007-2012), mostly for accelerometers, MOEMS, gyros and pressure sensors.  
 

Executive sumary

1. Introduction

2. MEMS Device Market Overview

3. MEMS Process Technolog y Overview

4. MEMS aplicatio ns:

Ink Jet Heads

Pressure Sensors

Silicon Microphones

Accelerometers

Gyroscopes

MOEMS

Micro Displays

Microfluidics

RF MEMS

Micro Tips

Micro Fuel Cells

Emerging applications

5. Equipment and Materials : Trends and Opportnities, competitive analysis

Equipment overview

Etch

Deposition

Lithography

Wafer bonding

Cleaning

Wafer thinning and planarization

Metrology

Packaging

Test

Materials: Wafers, Chemicals and Gases

LIST OF FIGURES

2007 Top 30 MEMS manufacturers

The MEMS supply chain 2007-2012

2007-2012 MEMS equipment sales forecast

2007-2012 MEMS materials forecast

MEMS market growth by product

2007-2012 Ink jet print head market forecast

2007 IJ heads market share

2007-2012 Pressure sensor market forecast.

2007 pressure sensor market share

2007-2012 Si microphones market forecast

2007 Si microphones market share

2007-2012 Accelerometer market forecast

2007-2012 Gyroscopes market forecast

2007-2012 MOEMS market forecast

2007-2012 Microfluidics market forecast

Microfluidics supply chain

Microfluidics business models

2007-2012 RF MEMS market forecast

2007-2012 MEMS micro tip market forecast

2007-2012 Emerging MEMS market forecast.

2007-2012 MEMS equipment market forecast

2007-2012 Etching equipment market forecast

2007 DRIE market share

2007-2012 Deposition equipment market forecast

2007-2012 Lithography equipment market forecast

Dual side stepper CD and overlay requirements roadmap

2007-2012 Wafer bonding market forecast

Wafer bonding technology by application.

Wafer bonding market share

2007-2012 Wafer thinning market forecast

2007-2012 MEMS test equipment market forecast

2007-2012 MEMS materials market forecast

2007-2012 unit forecast for silicon wafers for MEMS

2007-2012 Revenue forecast for silicon wafers for MEMS

2007-2012 SOI wafer unit forecast for MEMS applications

2007-2012 SOI wafer revenue forecast for MEMS applications

2007-2012 glass wafer unit forecast for MEMS

2007-2012 glass wafer revenue forecast for MEMS

2007-2012 photomask market forecast for MEMS

2007-2012 chemical and gas market forecast for MEMS