Electronic Component &

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Summary

Table of Contents

  • Publication date: June 2009
Keywords : MEMS, electronic, Semiconductor, Micro-Electro-Mechanical System

MEMS, abbreviated for Micro Electro Mechanical Systems, is a semiconductor technology integrating mechanics and electronics, which got widely applied for auto airbag preliminarily, and then for all the other auto industries via MEMS sensor. With the further development of MEMS technology, as well as the characteristics of application terminals such as lightness, thinness, shortness and smallness, the demand for small MEMS products with high perfo...

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