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Thin Film Deposition: Trends, Key Issues, Market Analysis

  • November 2016
  • -
  • Information Network
  • -
  • 198 pages

Thin film deposition processes play a critical role in the production of high-density, high-performance microelectronic products. Considerable progress has been achieved in the development of deposition processes -- and in the development of the reactor systems in which they are carried out. This report discusses the technology trends, products, applications, and suppliers of materials and equipment. It also gives insights to suppliers for future user needs and should assist them in long range planning, new product development and product improvement.

This report compares some of the issues impacting users of different deposition tools, including: APCVD (SACVD), LPCVD, PECVD, HDPCVD, ALCVD, PVD, ALD. Market forecasts and market shares of vendors is presented.

Table Of Contents

Thin Film Deposition: Trends, Key Issues, Market Analysis
TABLE OF CONTENTS

Chapter 1 Introduction 1-1

Chapter 2 Executive Summary 2-1

Chapter 3 Physical Vapor Deposition 3-1

3.1 Introduction 3-1
3.2 Sputtering Technology 3-2
3.3 Plasma Technology 3-5
3.4 Reactor Designs 3-14
3.4.1 Long-Throw Deposition 3-14
3.4.2 Collimated Sputter Deposition 3-16
3.4.3 Showerhead Deposition 3-18
3.4.4 Ionized PVD 3-22
3.5 Semiconductor Processing 3-28
3.5.1 Feature Patterning 3-28
3.5.2 Gap Fill 3-31
3.6 Targets 3-34

Chapter 4 Chemical Vapor Deposition 4-1

4.1 Introduction 4-1
4.2 Chemical Vapor Deposition (CVD) Techniques 4-1
4.2.1 APCVD 4-1
4.2.2 LPCVD 4-6
4.2.3 PECVD 4-9
4.2.4 HDPCVD 4-13
4.2.5 ALD 4-19


Chapter 5 Electrochemical Deposition 5-1

5.1 Introduction 5-1
5.2 Reactor Design 5-5
5.3 Challenges 5-6
5.4 Additives 5-8
5.5 Processing 5-9
5.5.1 Superfilling 5-9
5.5.2 Aspect Ratios 5-9
5.6 Copper Cathodes 5-10
5.7 Wet Copper Seed-Layer 5-11

Chapter 6 Film Deposition And Film Properties 6-1

6.1 Introduction 6-1
6.2 Dielectric Deposition 6-4
6.2.1 Silicon Dioxide 6-5
6.2.1.1 Thermal CVD 6-5
6.2.1.2 PECVD 6-6
6.2.1.3 HDPCVD 6-9
6.2.2 Silicon Nitride 6-13
6.2.2.1 Thermal CVD 6-13
6.2.2.2 PECVD 6-14
6.2.2.3 HDPCVD 6-19
6.2.3 High-K Dielectrics 6-19
6.2.4 Low-K Dielectrics 6-22
6.3 Metal Deposition 6-23
6.3.1 Aluminum 6-23
6.3.2 Tungsten/Tungsten Silicide 6-26
6.3.3 Titanium Nitride 6-28

Chapter 7 Vendor Issues 7-1

7.1 Introduction 7-1
7.2 300mm Processing 7-6
7.3 Integrated Processing 7-8
7.4 Copper 7-12
7.5 Metrology 7-15
7.6 ESD 7-18
7.7 Parametric Test 7-19

Chapter 8 Market Forecast 8-1

8.1 Introduction 8-1
8.2 Key Issues 8-4
8.3 Market Forecast Assumptions 8-7
8.4 Market Forecast 8-8
8.4.1 Chemical Vapor Deposition 8-8
8.4.2 Physical Vapor Deposition 8-28
8.4.3 Copper Electroplating Market 8-32
8.4.4 Atomic Layer Deposition Market 8-36


FIGURES

3.1 Schematic Of Sputtering System 3-3
3.2 Magnetron Sputtering Design 3-9
3.3 Showerhead Reactor Design 3-19
3.4 Ionized PVD 3-24
4.1 APCVD Reactor 4-3
4.2 Tube CVD Reactor 4-7
4.3 HDPCVD Reactor 4-17
4.4 ALD Versus PVD Copper Barrier 4-26
5.1 Copper Electroplating System 5-3
7.1 Comparison Between Semiconductor and Equipment Revenues 7-4
8.1 Worldwide MCVD Market Shares 8-12
8.2 Worldwide DCVD Market Shares 8-13
8.3 Worldwide DCVD Market By Sectors 8-15
8.4 Worldwide HDHCVD Market Shares 8-18
8.5 Worldwide PECVD Market Shares 8-21
8.6 Worldwide SACVD Market Shares 8-24
8.7 Worldwide LPCVD Market Shares 8-27
8.8 Worldwide PVD Market Shares 8-31
8.9 Worldwide ECD Market Shares 8-34
8.10 Worldwide ALD Market Shares 8-38


TABLES

8.1 Worldwide CVD Market Forecast 8-9
8.2 Worldwide MCVD Market Shares 8-10
8.3 Worldwide DCVD Market Shares 8-11
8.4 Worldwide HDPCVD Market Forecast 8-16
8.5 Worldwide HDPCVD Market Shares 8-17
8.6 Worldwide PECVD Market Forecast 8-19
8.7 Worldwide PECVD Market Shares 8-20
8.8 Worldwide SACVD Market Forecast 8-22
8.9 Worldwide SACVD Market Shares 8-23
8.10 Worldwide LPCVD Market Forecast 8-25
8.11 Worldwide LPCVD Market Shares 8-26
8.12 Worldwide PVD Market Forecast 8-29
8.13 Worldwide PVD Market Shares 8-30
8.14 Worldwide ECD Market Forecast 8-33
8.15 Worldwide ALD Market Forecast 8-37

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