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  4. > The Global MEMS Device, Equipment, and Materials Markets: Forecasts and Strategies for Vendors and Foundries

This vision of MEMS whereby microsensors, microactuators and microelectronics and other technologies, can be integrated onto a single microchip is expected to be one of the most important technological breakthroughs of the future. A significant portion of MEMS manufacturing technology has come from the IC industry. MEMS devices can be made using silicon wafers and the manufacturing process can incorporates semiconductor manufacturing processes such as sputtering, deposition, etching and lithography.

This report analyzes the market for MEMS by devices and systems. The equipment and materials to make them are analyzed and forecast.

Table Of Contents

The Global MEMS Device, Equipment, and Materials Markets: Forecasts and Strategies for Vendors and Foundries
TABLE OF CONTENTS

Chapter 1 The MEMS Market Infrastructure 1-1

Chapter 2 Forecast Of The Key Applications And Markets 2-1

2.1 MEMS Device Market Forecast 2-1
2.1.1 Ink Jet Head 2-3
2.1.2 Pressure Sensor 2-6
2.1.3 Silicon Microphone 2-8
2.1.4 Accelerometer 2-13
2.1.5 Gyroscope 2-17
2.1.6 Micro Display 2-20
2.1.7 Other MOEMS 2-24
2.1.8 Microfluidics 2-28
2.1.9 RF MEMS 2-31
2.1.10 Digital Compass 2-35
2.1.11 Inertial Sensor 2-37
2.1.12 Emerging Applications 2-39
2.2 MEMS System Market Forecast 2-42
2.2.1 Automotive Systems 2-48
2.2.2 Aeronautics Systems 2-50
2.2.3 Consumer Systems 2-52
2.2.4 Defense Systems 2-54
2.2.5 Industrial Systems 2-56
2.2.6 Medical/Life Sciences Systems 2-58
2.2.7 Telecom Systems 2-60

Chapter 3 Markets for Equipment and Materials Suppliers 3-1

3.1 Introduction 3-1
3.2 MEMS Equipment Markets 3-2
3.2.1 Assembly 3-4
3.2.2 Bonding 3-7
3.2.3 Cleaning 3-10
3.2.4 Deposition 3-12
3.2.5 Dicing 3-18
3.2.6 Etching 3-20
3.2.7 Laser Micromachining 3-26
3.2.8 Lithography 3-31
3.2.9 Metrology/Inspection 3-36
3.2.10 Testing 3-39
3.2.11 Thermal Treatment 3-42
3.2.12 Wafer Thinning 3-44
3.3 MEMS Material Markets 3-47
3.3.1 Chemicals 3-47
3.3.2 Photomasks 3-50
3.3.3 Substrates 3-53

Chapter 4 MEMS Foundries 4-1

4.1 Foundry Profiles and Strategies 4-1
4.1.1 Advanced Microsensors 4-3
4.1.2 Agiltron 4-3
4.1.3 Asia Pacific Microsystems 4-4
4.1.4 Beijing First MEMS 4-4
4.1.5 Bosch 4-5
4.1.6 China Resources Semiconductor 4-5
4.1.7 Colibrys 4-6
4.1.8 C2V 4-7
4.1.9 Dai-Nippon Printing 4-7
4.1.10 Dalso 4-8
4.1.11 Freescale 4-9
4.1.12 GLOBALFOUNDRIES 4-9
4.1.13 Honeywell MEMSplus 4-10
4.1.14 Infineon Technologies SensoNor As 4-10
4.1.15 Institute of Microelectronics 4-11
4.1.16 Innovative Micro Tech 4-12
4.1.17 Integrated Sensing Systems Inc. (ISSYS) 4-13
4.1.18 LioniX 4-13
4.1.19 MEMS Engineering and Material 4-14
4.1.20 MEMSCAP 4-14
4.1.21 Micralayne 4-15
4.1.22 Micrel 4-15
4.1.23 Midwest MicroDevices, LLC 4-16
4.1.24 Nanostructures Inc 4-16
4.1.25 Norcada Inc. 4-17
4.1.26 Olympus 4-17
4.1.27 Omron 4-18
4.1.28 Proton Mikrotechnik 4-19
4.1.29 Semiconductor Manufacturing International Corporation 4-19
4.1.30 SEMEFAB 4-20
4.1.31 Silex Microsystems 4-20
4.1.32 Sony 4-20
4.1.33 ST Microelectronics 4-21
4.1.34 Taiwan Semiconductor Manufacturing Co Ltd (TSMC) 4-21
4.1.35 Texas Instruments 4-22
4.1.36 Touch Microsystems 4-22
4.1.37 Tronics Microsystems 4-23
4.1.38 X-Fab 4-24
4.2 Small-Mid-Sized Companies 4-25

Chapter 5 Factors for Foundry Success 5-1

5.1.1 Achieving Economies Of Scale 5-1
5.1.2 Competitive Advantages 5-2
5.1.3 Core Strengths 5-3
5.1.4 Employee Commitment 5-3
5.1.5 Expansion Plans 5-3
5.1.6 Financial Objectives: 5-4
5.1.7 Groundbreaking MEMS Solutions 5-4
5.1.8 In- House Expertise in MEMS Testing And Reliability 5-4
5.1.9 Leadership in Technology 5-5
5.1.10 Manufacturing Excellence 5-5
5.1.11 Manufacturing Process 5-7
5.1.12 Mastering Process and Production Technology 5-7
5.1.13 Patent Protection 5-7
5.1.14 Partnerships 5-8
5.1.15 Products 5-8
5.1.16 Proprietary Development Processes 5-9
5.1.17 Sales Organization 5-9
5.1.18 Sales Process and Customer Base 5-9
5.1.19 Strong Customer Relations 5-10
5.1.20 Vision and Goal 5-10

Chapter 6 Critical MEMS Issues 6-1

6.1 3-D Interconnects and Packaging 6-1
6.2 Wafer Size 6-12
6.3 MEMS Testing 6-15
6.4 Opportunities For Fabless MEMS Companies 6-19


LIST OF TABLES

4.1 Top MEMS Foundries by Revenues 4-2


LIST OF FIGURES

2.1 MEMS Markets 2-2
2.2 Ink Jet Head Sales Forecast 2-5
2.3 Pressure Sensor Sales Forecast 2-7
2.4 Silicon Microphone Sales Forecast 2-12
2.5 Accelerometer Sales Forecast 2-16
2.6 Gyroscope Sales Forecast 2-19
2.7 Micro Display Sales Forecast 2-23
2.8 Other MOEMS Sales Forecast 2-27
2.9 Microfluidics Sales Forecast 2-30
2.10 RF MEMS Sales Forecast 2-34
2.11 Digital Compass Sales Forecast 2-36
2.12 Inertial Sensor Sales Forecast 2-38
2.131 Emerging Applications Sales Forecast 2-41
2.12 Automotive System Sales Forecast 2-49
2.15 Aeronautics System Sales Forecast 2-51
2.16 Consumer System Sales Forecast 2-53
2.17 Defense System Sales Forecast 2-55
2.18 Industrial System Sales Forecast 2-57
2.19 Medical System Sales Forecast 2-59
2.20 Telecom System Sales Forecast 2-61
3.1 Discrete Assembly of MEMS 3-5
3.2 Assembly Equipment Sales Forecast 3-6
3.3 Bonding Equipment Sales Forecast 3-9
3.4 Cleaning Equipment Sales Forecast 3-11
3.5 Deposition Equipment Sales Forecast 3-17
3.6 Dicing Equipment Sales Forecast 3-19
3.7 Schematic Of DRIE 3-22
3.8 Etching Equipment Sales Forecast 3-25
3.9 Laser Micromachining Equipment Sales Forecast 3-30
3.10 Driving Principle Of The MOR (a) Parallel State (B) Tilted State 3-33
3.11 Lithography Equipment Sales Forecast 3-35
3.12 Metrology/Inspection Equipment Sales Forecast 3-38
3.13 Testing Equipment Sales Forecast 3-41
3.14 Thermal Treatment Equipment Sales Forecast 3-43
3.15 Wafer Thinning Equipment Sales Forecast 3-46
3.16 Chemicals Sales Forecast 3-49
3.17 Photomasks Sales Forecast 3-52
3.18 Substrates Sales Forecast 3-54
3.19 Wafer Starts By Substrate Size 3-56
6-1 Process For Capping MEMS 6-5
6-2 Examples Of Thermoplastic Cavity Packages 6-6
6.3 Fluidic Packaging System 6-8
6.4 Forecast of Wafer Size 6-14
6-5 Fluidic Packaging System 6-18

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