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Metrology, Inspection, and Process Control in VLSI Manufacturing

  • March 2017
  • -
  • Information Network
  • -
  • 299 pages

Summary

Table of Contents

The increase in complexity of semiconductors and the resulting increase in the complexity and cost of the semiconductor manufacturing process has been a driver of demand for metrology and inspection systems.

This report offers a complete analysis of the Process Control market, segmented as: Lithography Metrology; Wafer Inspection/Defect Review; Thin Film Metrology; and Other Process Control Systems. Each of these sectors is further segmented. Market shares of competitors for all segment is presented.

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