THIS REPORT CONTAINS
Information about the global markets for chemicals and materials for the electronics industry
Analysis of global market trends, with data from 2009, estimates for 2010, and projections of compound annual growth rates (CAGRs) through 2015
An overview of the market by end-use products (semiconductors and printed circuit boards in the electronics industry) and also major types of chemicals and materials used in the electronics industry
Discussion of emerging trends in these industries and technological developments, including some of the recent patents in the field
The important regulatory roles governing the industry
STUDY BACKGROUND
Electronic chemicals and materials are solid, liquid, and gaseous substances used in the fabrication of semiconductors and printed circuit boards (PCBs). Global demand for electronic chemicals and materials, particularly in developed countries, is projected to increase at a compound annual growth rate (CAGR) of 12.6% through 2015.
The increase in demand for electronic chemicals and materials is related to overall growth in the production of electronic devices, as well as technological innovation that will create opportunities for new materials. New materials such as low-k dielectrics and advanced photoresists will see growth rates well above average, and opportunities will also emerge in existing technologies as chemical compositions are improved to attain better compatibility and lower costs.
STUDY GOALS AND OBJECTIVES
In such a dynamic environment there is a need for current, comprehensive reports on electronic chemicals and materials covering aspects of technology, demand trends, project opportunities, and investment levels. This report is an updated version of a report published by BCC Research in September 2006.
The goal of this report is to provide a detailed analysis of recent trends in the chemicals and other materials that go into products manufactured in the global electronics industry. It examines technological developments, future trends, and emerging opportunities for every major segment and subsegment of the global market. This information will be useful for strategic planning, marketing, sales, and research and development.
The major objectives of this study are as follows:
To assess technological developments in electronic chemicals and determine their current and future impact on the overall market.
To identify the factors driving demand.
To make available the most current and reliable information on the consumption of chemicals and other materials in the global electronics industry.
To estimate the global supply and demand scenario by application and global region.
To estimate the growth rate in demand.
To estimate the projected supply and demand scenario through 2015.
INTENDED AUDIENCE
This report is intended for suppliers of electronics chemicals and materials. Other readers who may find it particularly useful include entrepreneurs, investors, venture capitalists, and other readers who need to know where the electronic chemicals and materials market is headed over the next 5 years.
The report should also be of interest to users of electronic chemicals and materials such as semiconductor manufacturers. Finally, members of technical and professional organizations such as the Semiconductor Industry Association should find the report useful.
METHODOLOGY
The findings and conclusions of this report are based on information gathered from industry sources, including manufacturers and users of electronic chemicals and materials. Interview data were combined with information gathered through an extensive review of secondary sources such as trade publications, trade associations, company literature, and online databases to produce the market projections contained in this report.
The base year for analysis and projection is 2009. With 2009 as a baseline, market projections were developed for 2010–2015. These projections are based on a combination of the consensus among the primary contacts along with our understanding of the key market drivers and their impact from a historical and analytical perspective. The analytical methodologies used to generate the market estimates are described in greater detail in the section on Global Electronic Chemical and Material Markets.
All dollar projections presented in this report are in 2009 constant dollars unless otherwise noted.
SCOPE AND FORMAT
The report addresses the global market for electronic chemicals and materials during the period from 2009 through 2015. It covers the entire range of chemicals and materials that are used in the fabrication of ICs and PCBs, including:
Wafers
CMP slurries
Gases
Polymers
Photoresist chemicals
Wet chemicals and solvents
Miscellaneous chemicals and solvents
The report format includes the following major elements:
Executive summary
Technology trends
Products and manufacturers
Key patents and patent analysis
Major applications in which electronic chemicals and materials are used (e.g., semiconductor, LCD display fabrication)
Market drivers
Global trends in the market for electronic chemicals and materials by technology, product type, application, and geographical region for the time period 2009–2015
Electronic chemical and material manufacturer market shares
Global Electronic Manufacturing Industry
Chapter- 1: INTRODUCTION -- Complimentary
STUDY BACKGROUND 1
STUDY GOALS AND OBJECTIVES 1
INTENDED AUDIENCE 2
METHODOLOGY 2
SCOPE AND FORMAT 3
ANALYST CREDENTIALS 3
RELATED BCC REPORTS 4
BCC ONLINE SERVICES 4
DISCLAIMER 5
Chapter-2: SUMMARY
SUMMARY TABLE GLOBAL ELECTRONIC CHEMICALS AND MATERIALS MARKET, THROUGH 2015 ($ MILLIONS) 6
SUMMARY FIGURE GLOBAL MARKET FOR ELECTRONIC CHEMICALS AND MATERIALS, 2009–2015 ($ BILLIONS) 7
Chapter-3: OVERVIEW
SEMICONDUCTOR APPLICATIONS 8
PRINTED CIRCUIT BOARD APPLICATIONS 8
ELECTRONIC MATERIALS 8
WAFERS 9
CMP SLURRIES 9
ELECTRONIC CHEMICALS 9
ELECTRONIC GASES 9
Bulk Gases 9
Argon 10
Carbon Dioxide 10
Chlorine 10
Helium 10
Hydrogen 10
Nitrogen 11
Oxygen 11
Specialty Gases 11
Boron Trichloride 11
Chlorine Trifluoride 11
Hydrogen Bromide 11
Nitrogen Trifluoride 11
Silicon Precursor Gases 12
Sulfur Hexafluoride 12
Reactant Gases 12
Ammonia 12
Nitrous Oxide 12
Dopant Gases 13
Arsine 13
Diborane 13
Phosphine 13
Miscellaneous Gases 13
POLYMERS AND CONDUCTIVE POLYMERS 14
POLYACETYLENES 14
POLYANILINE 15
POLYETHYLENE DIOXYTHIOPHENE (PEDOT) 15
POLYPYRROLE (PPY) 15
PHOTORESIST CHEMICALS 15
NEGATIVE PHOTORESISTS 16
POSITIVE PHOTORESISTS 16
I-line and G-line Photoresists 17
Deep Ultraviolet (DUV) Photoresists 17
Immersion Photoresists 17
Next-Generation Photoresists 18
Electron Beam Photoresists 18
Extreme Ultraviolet Photoresists 18
Other Advanced Photoresists 18
WET CHEMICALS AND SOLVENTS 19
ACETIC ACID 19
HYDROCHLORIC ACID 20
HYDROFLUORIC ACID 20
HYDROGEN PEROXIDE 20
ISOPROPYL ALCOHOL 20
METHANOL 20
METHYL CHLOROFORM 20
NITRIC ACID 21
PERFLUOROCARBONS (PFCS) 21
PERFLUOROOCTYL SULFONATES/PERFLUOROALKYL SULFONATES (PFOS/PFAS) 21
PHOSPHORIC ACID 21
SULFURIC ACID 21
SOLVENTS 22
MISCELLANEOUS CHEMICALS AND METALS 22
CADMIUM 22
COPPER 22
GALLIUM 22
MERCURY 22
SELENIUM 23
SILICON 23
SILVER 23
YTTRIUM 23
MISCELLANEOUS CHEMICALS 23
ALUMINUM GALLIUM ARSENIDE 23
BARIUM TITANATE 23
CHROMIUM DIOXIDE 24
GALLIUM ANTIMONIDE 24
GALLIUM PHOSPHIDE 24
HYDROXYLAMINE 24
INDIUM GALLIUM PHOSPHIDE 24
PERFLUORO BUTADIENE 24
POLYCRYSTALLINE SILICON OR POLYSILICON 24
TUNGSTEN HEXAFLUORIDE 25
SUMMARY OF MATERIALS USED IN ELECTRONICS 25
TABLE 1 SUMMARY OF IMPORTANT ELECTRONIC CHEMICALS APPLICATIONS 25
TABLE 1 (CONTINUED) 26
TABLE 1 (CONTINUED) 27
TABLE 1 (CONTINUED) 28
TABLE 2 SUMMARY OF IMPORTANT ELECTRONIC MATERIALS APPLICATIONS 28
PURITY REQUIREMENTS OF ELECTRONIC CHEMICALS 28
HISTORICAL TECHNOLOGY DEVELOPMENTS IN THE ELECTRONIC CHEMICAL INDUSTRY 29
HISTORICAL TECHNOLOGY DEVELOPMENTS (CONTINUED) 30
TIMELINE 31
TABLE 3 HISTORICAL DEVELOPMENTS IN THE ELECTRONIC CHEMICAL INDUSTRY 31
TABLE 3 (CONTINUED) 32
TABLE 3 (CONTINUED) 33
CURRENT STATUS OF THE ELECTRONICS INDUSTRY 33
CURRENT STATUS OF THE ELECTRONICS … (CONTINUED) 34
Chapter-4: TECHNOLOGY OVERVIEW
IMPORTANT OPERATIONS IN SEMICONDUCTOR MANUFACTURING 35
BLANK WAFER PRODUCTION 35
Discrete Epitaxial Silicon Wafers 35
MOS Epitaxial Silicon Wafers 36
Wafer Processing 37
Shaping 37
Etching 38
Other Operations 38
PROCESSES FOR SEMICONDUCTOR FABRICATION 39
OXIDATION 39
COATING APPLICATION 39
ETCHING 40
Decapsulation 40
Wet Etching 40
Dry Etching 41
PHOTORESIST STRIPPING 41
DOPING 42
CHEMICAL MECHANICAL PLANARIZATION (CMP) 43
Oxide Planarization 44
Polysilicon Planarization 44
Metal Planarization 44
REMOVAL OF OXIDES AND MOISTURE 44
MULTILAYER PRESSING 45
ASSEMBLY AND PACKAGING 45
CHEMICALS USED IN THE PROCESSING OPERATION 46
TABLE 4 CHEMICALS USED IN SEMICONDUCTOR FABRICATION PROCESSES 46
TABLE 4 (CONTINUED) 47
PRINTED CIRCUIT BOARD MANUFACTURING 47
PROCESS OUTLINE 48
Chapter-5: OVERVIEW OF THE ELECTRONICS COMPONENT MARKET
ELECTRONICS COMPONENT INDUSTRY STRUCTURE 49
TABLE 5 GLOBAL MARKET FORECAST FOR SEMICONDUCTORS AND PCBS, THROUGH 2015 ($ BILLIONS) 50
STATUS OF THE SEMICONDUCTOR INDUSTRY 50
TABLE 6 GLOBAL SEMICONDUCTOR MARKET 2000–2015 ($ BILLIONS) 51
FIGURE 1 GLOBAL MARKET FOR SEMICONDUCTORS, 2000–2015 ($ BILLIONS) 51
TABLE 7 RANKING OF GLOBAL COMPANIES IN SEMICONDUCTOR INDUSTRY, 2009 52
REGIONAL MARKETS 52
TABLE 8 GLOBAL MARKET FORECAST FOR SEMICONDUCTORS BY REGION, THROUGH 2015 ($ BILLIONS) 53
Asia-Pacific 53
TABLE 9 SEMICONDUCTOR MARKET FORECAST IN ASIA-PACIFIC (EXCEPT JAPAN), THROUGH 2015 ($ BILLIONS) 53
FIGURE 2 INDIVIDUAL COUNTRIES’ SHARE OF ASIA-PACIFIC SEMICONDUCTOR MARKET (EXCEPT JAPAN), 2009 (%) 54
Asia-Pacific (Continued) 55
Japan 56
Europe 56
North America 56
SEMICONDUCTOR MARKET SECTORS 56
TABLE 10 GLOBAL MARKET FORECAST FOR SEMICONDUCTORS BY SECTOR, THROUGH 2015 ($ BILLIONS) 57
FIGURE 3 GLOBAL SEMICONDUCTOR MARKET SHARE BY SECTOR, 2009 (%) 58
APPLICATIONS 59
Computer Market 59
Communications Market 59
Consumer Products Market 59
Automotive Market 60
Industrial/Office Market 60
Medical Market 60
Military/Aerospace Market 61
STATUS OF PRINTED CIRCUIT BOARD INDUSTRY 61
TABLE 11 GLOBAL MARKET FOR PRINTED CIRCUIT BOARDS, THROUGH 2015 ($ BILLIONS) 61
FIGURE 4 GLOBAL PRINTED CIRCUIT BOARD MARKET SHARES BY SECTOR, 2009 (%) 62
INDUSTRY TRENDS 63
REGIONAL SHARES OF THE PCB MARKET 63
TABLE 12 GLOBAL PCB MARKET FORECAST BY REGION, THROUGH 2015 ($ BILLIONS) 63
FIGURE 5 GLOBAL MARKT SHARE OF PCB PRODUCTION BY REGION, 2009 (%) 64
Asia-Pacific 64
Japan 65
North America 65
Europe 65
Chapter-6: GLOBAL ELECTRONIC CHEMICAL AND MATERIALS MARKETS
TABLE 13 GLOBAL ELECTRONIC CHEMICALS AND MATERIALS MARKET FORECAST BY TYPE, THROUGH 2015 ($ MILLIONS) 66
REGIONAL MARKETS 67
TABLE 14 GLOBAL ELECTRONIC CHEMICALS AND MATERIALS MARKET FORECAST BY REGION, THROUGH 2015 ($ MILLIONS) 67
FIGURE 6 MARKET SHARE OF ELECTRONIC CHEMICAL AND MATERIALS BY REGION, 2009 (%) 68
THE WAFER MARKET 68
TABLE 15 GLOBAL WAFER MARKET FORECAST BY TYPE, THROUGH 2015 ($ BILLIONS) 69
FIGURE 7 GLOBAL WAFER MARKET SHARE BY TYPE, 2009 (%) 70
TABLE 16 GLOBAL MARKET FOR WAFERS BY REGION, THROUGH 2015 ($ BILLIONS) 70
FIGURE 8 GLOBAL WAFER MARKET SHARE BY REGION, 2009 (%) 71
SILICON WAFERS 71
TABLE 17 GLOBAL SILICON WAFER MARKET FORECAST, THROUGH 2015 ($ BILLIONS) 72
FIGURE 9 GLOBAL MARKET SHARE OF SILICON WAFERS BY TYPE, 2009 (%) 73
GALLIUM ARSENIDE WAFERS 73
TABLE 18 GLOBAL GALLIUM ARSENIDE WAFER MARKET FORECAST, THROUGH 2015 ($ BILLIONS) 74
CMP SLURRIES 74
TABLE 19 GROWTH IN THE USE OF CMP SLURRIES IN SEMICONDUCTOR WAFER PRODUCTION, 1996–2009 (PERCENTAGE OF WAFER PRODUCED USING CMP) 75
TABLE 20 GLOBAL MARKET FORECAST FOR CMP SLURRIES BY TYPE, THROUGH 2015 ($ MILLIONS) 75
FIGURE 10 GLOBAL CMP MARKET SHARES BY TYPE, 2009 (%) 76
TABLE 21 GLOBAL MARKET FORECAST FOR CMP SLURRIES BY REGION, THROUGH 2015 ($ MILLIONS) 77
ELECTRONIC GASES 77
TABLE 22 GLOBAL MARKET FORECAST FOR ELECTRONIC GASES, THROUGH 2015 ($ BILLIONS) 78
FIGURE 11 GLOBAL MARKET SHARE OF ELECTRONIC GASES, BY TYPE, 2009 (%) 78
SPECIALTY GASES 79
BULK GASES 80
REACTANT GASES 80
MISCELLANEOUS GASES INCLUDING DOPANT GASES 80
TABLE 23 GLOBAL MARKET FORECAST FOR ELECTRONIC GASES BY REGION, THROUGH 2015 ($ BILLIONS) 81
POLYMERS 81
TABLE 24 GLOBAL MARKET FORECAST FOR POLYMERS IN ELECTRONICS, INCLUDING CONDUCTIVE POLYMERS BY TYPE, THROUGH 2015 ($ MILLIONS) 82
FIGURE 12 MARKET SHARE OF POLYMERS IN THE GLOBAL ELECTRONICS INDUSTRY, 2009 (%) 83
REGIONAL MARKET SHARE FOR POLYMERS 83
TABLE 25 GLOBAL MARKET FOR POLYMERS IN ELECTRONICS BY REGION, THROUGH 2015 ($ MILLIONS) 84
PHOTORESISTS 84
TABLE 26 GLOBAL ELECTRONICS PHOTORESIST MARKET FORECAST BY TYPE, THROUGH 2015 ($ MILLIONS) 84
FIGURE 13 GLOBAL MARKET SHARE OF ELECTRONICS PHOTORESIST BY TYPE, 2009 (%) 85
TABLE 27 GLOBAL MARKET FORECAST FOR PHOTORESISTS BY REGION, THROUGH 2015 ($ MILLIONS) 86
WET CHEMICALS AND SOLVENTS 86
TABLE 28 GLOBAL MARKET FORECAST FOR WET CHEMICALS IN ELECTRONICS, THROUGH 2015 ($ MILLIONS) 87
FIGURE 14 GLOBAL MARKET SHARES OF WET CHEMICALS BY TYPE, 2009 (%) 87
FIGURE 14 (CONTINUED) 88
TABLE 29 GLOBAL MARKET FOR WET CHEMICALS AND SOLVENTS IN ELECTRONICS BY REGION, THROUGH 2015 ($ MILLIONS) 89
MISCELLANEOUS CHEMICALS INCLUDING METALS 89
TABLE 30 GLOBAL MARKET FORECAST FOR MISCELLANEOUS CHEMICALS IN ELECTRONICS INCLUDING METALS, THROUGH 2015 ($ MILLIONS) 89
TABLE 31 GLOBAL MARKET FORECAST FOR METALS AND MISCELLANEOUS CHEMICALS IN ELECTRONICS BY REGION, THROUGH 2015 ($ MBILLIONS) 90
Chapter-7: GLOBAL END-USER MARKETS FOR ELECTRONIC CHEMICALS AND MATERIALS
TABLE 32 GLOBAL MARKET FORECAST FOR ELECTRONIC CHEMICALS AND MATERIALS BY COMPONENT, THROUGH 2015 ($ MILLIONS) 91
SEMICONDUCTORS 91
TABLE 33 GLOBAL MARKET FORECAST FOR ELECTRONIC CHEMICALS AND MATERIALS IN SEMICONDUCTORS BY SECTOR, THROUGH 2015 ($ MILLIONS 92
FIGURE 15 GLOBAL MARKET SHARE FORELECTRONIC CHEMICALS AND MATERIALS USED IN SEMICONDUCTOR BY SECTOR, 2009 (%) 93
REGIONAL MARKET FOR ELECTRONIC CHEMICALS AND MATERIALS USED IN SEMICONDUCTORS 93
TABLE 34 GLOBAL MARKET FORECAST FOR ELECTRONIC CHEMICALS AND MATERIALS IN SEMICONDUCTORS BY REGION, THROUGH 2015 ($ MILLIONS) 94
MATERIALS AND CHEMICALS USED IN SEMICONDUCTORS 94
TABLE 35 GLOBAL SEMICONDUCTOR MARKET FOR ELECTRONIC MATERIAL AND CHEMICAL MARKET IN SEMICONDUCTORS BY PRODUCT, THROUGH 2015 ($ BILLION) 94
TABLE 35 (CONTINUED) 95
Wafers 95
CMP Slurries 95
Photoresists 96
Wet Chemicals 96
Polymers 96
PCBS 96
TABLE 36 GLOBAL MARKET FORECAST FOR ELECTRONIC CHEMICALS USED IN PCBS BY SECTOR, THROUGH 2015 ($ MILLIONS) 97
FIGURE 16 GLOBAL MARKET SHARE FOR ELECTRONIC CHEMICALS AND MATERIALS USED IN PCBS, 2009 (%) 98
REGIONAL MARKET FOR ELECTRONIC CHEMICAL AND MATERIAL USED IN PRINTED CIRCUIT BOARDS 99
TABLE 37 GLOBAL MARKET FORECAST FOR ELECTRONIC CHEMICALS AND MATERIALS FOR PCB BY REGION, THROUGH 2015 ($ MILLIONS) 99
MATERIALS AND CHEMICALS USED IN PCBS 100
TABLE 38 GLOBAL FORECAST FOR ELECTRONIC MATERIALS AND CHEMICALS IN THE PCB MARKET, THROUGH 2015 ($ BILLIONS) 100
Chapter-8: NANOTECHNOLOGY APPLICATIONS IN ELECTRONIC CHEMICALS AND MATERIALS
NANOMATERIALS FOR ELECTRONICS APPLICATIONS 101
NANOPARTICLE APPLICATIONS 102
Chemical-Mechanical Polishing (CMP) Compounds 102
Multilayer Ceramic Capacitors 102
Electronic Inks 103
Light-Emitting Diodes 104
Flat-Panel Displays 104
HOLLOW NANOPARTICLES APPLICATIONS 105
Semiconductors 105
Electronic Inks 106
Displays 106
Computer Memory 107
NANOSCALE THIN FILM APPLICATIONS 107
Displays 108
Solid-State Lighting 108
Hard Disk Media and Heads 108
Low-K Dielectric Coatings 109
Electroconductive Coatings 109
Transparent Electrodes 109
NANOCOMPOSITE APPLICATIONS 110
Electrostatic Discharge Dissipation 110
MARKETS 110
TABLE 39 GLOBAL MARKET FOR NANOMATERIALS USED IN ELECTRONICS APPLICATIONS, THROUGH 2015 ($ MILLIONS) 110
TABLE 39 (CONTINUED) 111
TABLE 40 NANOMATERIALS AS A PERCENTAGE OF ELECTRONIC CHEMICALS AND MATERIALS CONSUMED GLOBALLY, THROUGH 2018 ($ MILLIONS) 111
Chapter-9: REGULATIONS
UNITED STATES 112
UNITED STATES (CONTINUED) 113
UNITED STATES (CONTINUED) 114
EUROPEAN UNION 115
ASIA 115
TOXIC AND HAZARDOUS CHEMICALS USED IN THE ELECTRONICS INDUSTRY 116
TABLE 41 ELECTRONIC GAS APPLICATIONS AND CLIMATE IMPACT 116
FLUORINATED COMPOUNDS 116
Perfluorooctyl Sulfonates/Perfluoroalkyl Sulfonates (PFOS/PFAS) 117
Polybrominated Diphenyl Ethers (PBDEs) 117
Europe 118
LEAD 118
WASTE ELECTRONIC EQUIPMENT 118
Chapter-10: INDUSTRY TRENDS
INDUSTRY COOPERATION/OWNERSHIP CHANGES 119
RESEARCH AND DEVELOPMENT 120
NEW INVESTMENTS AND EXPANSIONS 121
SHORTER DEVELOPMENT CYCLES 122
Chapter-11: MARKET SHARES AND PROFILES OF MAJOR PLAYERS
MARKET SHARES OF MAJOR PLAYERS 123
TABLE 42 GLOBAL MARKET SHARES OF MAJOR PLAYERS IN THE ELECTRONIC MATERIALS AND CHEMICALS INDUSTRY, 2009 (%) 123
FIGURE 17 GLOBAL MARKET SHARES OF MAJOR PLAYERS IN THE ELECTRONIC MATERIALS AND CHEMICALS INDUSTRY, 2009 (%) 124
COMPANY PROFILES 124
AIR LIQUIDE 124
AIR PRODUCTS AND CHEMICALS, INC. 125
AZ ELECTRONIC MATERIALS 126
DUPONT AIR PRODUCTS NANOMATERIALS LLC (DA NANOMATERIALS) 126
BASF 127
CABOT MICROELECTRONICS 127
HITACHI CHEMICAL CO. 127
JSR CORP. 128
KANTO CHEMICAL CO., INC. 129
MEMC (MONSANTO ELECTRONIC MATERIALS CO.) 129
NANOMAG CO. LTD., KOREA 130
ROHM AND HAAS 130
SHIN-ETSU HANDOTAI 131
SHOWA DENKO 131
SUMITOMO CHEMICAL 132
SUMITOMO MITSUBISHI SILICON CORP. 132
TOKYO OHKA KOGYO 133
WACKER GROUP 134
OTHER PLAYERS 134
Chevron Phillips Chemical Co. 134
Chisso America Inc. 135
Cyantek Inc. 135
DIC Corp. 135
Dongwoo Fine Chemicals Co., Ltd. 135
Dongjin Semichem 136
DuPont Electronic Technologies 136
FMC Industrial Chemicals 136
Forge Europa Ltd. 136
General Chemical Corp. 136
Honeywell Specialty Materials Group 137
IBM Corp. 137
MacDermid, Inc. 137
Matheson Tri-Gas, Inc. 137
Nanocrystals Technology, Ltd. 138
Nantero, Inc. 138
Praxair, Inc. 138
RD Chemical 139
Solvay S.A 139
Toyo Nippon Sanso Corp. 139
UNIDYM 139
Chapter-12: APPENDIX
APPENDIX: PATENTS 140
COMPOSITIONS 140
CMP COMPOSITION OF BORON SURFACE-MODIFIED ABRASIVE AND NITRO-SUBSTITUTED SULFONIC ACID AND METHOD OF USE 140
COMPOSITION AND METHOD FOR COPPER CHEMICAL MECHANICAL PLANARIZATION 141
COMPOSITION AND ASSOCIATED METHODS FOR CHEMICAL MECHANICAL PLANARIZATION HAVING HIGH SELECTIVITY FOR METAL REMOVAL 142
COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY 143
PHOTORESIST COMPOSITIONS COMPRISING ACETALS AND KETALS AS SOLVENTS 144
APPLICATION DEVELOPMENT 145
SUPERCRITICAL CARBON DIOXIDE-BASED CLEANING OF METAL LINES 145
COATING MATERIAL FOR FORMING TRANSPARENT AND CONDUCTIVE FILM 145
HIGH PH SLURRY FOR CHEMICAL MECHANICAL POLISHING OF COPPER 146
REACTIVE MESOGENIC BENZODITHIOPHENES 147
PROCESS TECHNOLOGY 147
PROCESS FOR PRODUCING PHOTORESIST POLYMERIC COMPOUNDS 147
PROCESS FOR PRODUCING POLYIMIDE 148
PROCESS FOR PRODUCING POLYMER COMPOUNDS 149
METHOD FOR PRODUCING HIGH-PURITY SULFURIC ACID 149
SEMICONDUCTOR NANOPARTICLES COATED WITH ELECTROACTIVE POLYMERS 150
METHOD FOR THE PREPARATION OF A SEMICONDUCTOR DEVICE 151
Method for the Preparation (Continued) 152
