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Reverse Costing of Silicon Labs Si504 Oscillator

  • January 2014
  • -
  • System Plus Consulting
  • -
  • 108 pages

First Fully Integrated, Monolithic Cmos+Mems Oscillator Device

The frequency control market is largely dominated by quartz products, but silicon timing solutions have a strong value proposition for some sub-markets.

The Si504 is the first silicon oscillator from Silicon Labs. Manufactured with the CMEMS process (CMOS + MEMS), the crystal elements are replaced by micromachined semiconductor resonators.

CMEMS process consists in a monolithic integration of a CMOS circuit with Poly-SiGe (polycrystalline silicon-germanium) MEMS resonator structures.

The resonator is then vacuum encapsulated with a silicon cap using an eutectic wafer bonding process.

The Si504 is optimized to support high-volume, low-cost applications such as consumer electronics market.

This report will provide a complete teardown of the MEMS oscillator with:

- Detailed photos
- Material analysis
- Schematic assembly description
- Manufacturing Process Flow
- In-depth manufacturing cost analysis
- Supply chain evaluation
- Selling price estimation

Table Of Contents

Reverse Costing of Silicon Labs Si504 Oscillator
Glossary

Overview/Introduction
- Executive Summary
- Reverse Costing Methodology

Silicon Labs Company Profile
- Silicon Labs Profile
- Si504 Characteristics

Physical Analysis
Silicon Labs Si504
CMEMS Oscillator
- Physical Analysis Methodology
- Package
--Package View, Dimensions and Pin-out
-- Package X-Ray
-- Package Opening
-- Package Cross-Section
- Die
-- View, Dimensions and Marking
-- MEMS Cap Removed
-- MEMS Cap Details
-- MEMS Resonator Structure
-- CMEMS Delayering and IC Process
-- MEMS Cap Cross-Section
-- CMEMS Cross-Section
-- IC Layers
-- MEMS Layers

Manufacturing Process Flow
- Global Overview
- CMOS Front-End Process
- MEMS Resonator Process Flow
- MEMS Cap and Assembly Process Flow
- Wafer Fabrication Unit
- Packaging Process Flow and Assembly Unit

Cost Analysis
- Main steps of economic analysis
- Yields Hypotheses
- CMOS Front-End Cost
- MEMS Resonator Front-End Cost
- MEMS Cap Front-End Cost
- CMEMS/Cap Assembly Cost
- MEMS Front-End Cost per process steps
- MEMS Front-End: Equipment Cost per Family
- MEMS Front-End: Material Cost per Family
- Total Front-end Cost and Price
- Back-End 0 : Probe Test and Dicing
- Wafer and Die Cost
- Back-End : Packaging and Final Test Cost
- Si504 Component Cost

Estimated Price Analysis
- Silicon Labs Financial Ratios
- Si504 Estimated Price

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