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First Fully Integrated, Monolithic Cmos+Mems Oscillator Device
The frequency control market is largely dominated by quartz products, but silicon timing solutions have a strong value proposition for some sub-markets.
The Si504 is the first silicon oscillator from Silicon Labs. Manufactured with the CMEMS process (CMOS + MEMS), the crystal elements are replaced by micromachined semiconductor resonators.
CMEMS process consists in a monolithic integration of a CMOS circuit with Poly-SiGe (polycrystalline silicon-germanium) MEMS resonator structures.
The resonator is then vacuum encapsulated with a silicon cap using an eutectic wafer bonding process.
The Si504 is optimized to support high-volume, low-cost applications such as consumer electronics market.
This report will provide a complete teardown of the MEMS oscillator with:
- Detailed photos
- Material analysis
- Schematic assembly description
- Manufacturing Process Flow
- In-depth manufacturing cost analysis
- Supply chain evaluation
- Selling price estimation
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