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MEMS: Biosensors and Nanosensors

  • January 2016
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  • BCC Research
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  • 178 pages

This BCC Research report identifies the segments of the microsensor market with the greatest commercial potential in the near term to mid-term (2015 to 2020), and includes projections for future demand in these segments.

Use this report to:

Gain information on the commercial potential of various microsensor technologies and applications
Identify segments of the microsensor market, including Microelectromechanical Systems (MEMS), biosensors and nanosensors, and those with the greatest commercial potential in the near term to middle term (2015 to 2020)
Evaluate the challenges that must be overcome for each segment of the microsensor market to realize its potential
Receive information on various patents in the industry

Highlights

The global market for microsensors reached nearly $9.9 billion in 2014 and totaled almost $10.9 billion in 2015. The market should reach more than $18.9 billion in 2020, a compound annual growth rate (CAGR) of 11.7% between 2015 and 2020.
MEMS sensors account for the bulk of the microsensor market and as a segment is projected to increase from $6.4 billion in 2015 to $9.6 billionby 2020, a CAGR of 8.6% through the forecast period.
Biochips is the fastest growing segment of this market, totaling $4.0 billion in 2015 and $8.7 billion by 2020, with a CAGR of 16.5% for the period of 2015-2020.

STUDY BACKGROUND

This report is an update of an earlier BCC Research report published in 2013.
Microelectromechanical systems (MEMS), biochips, and nanosensors (referred to collectively in this report as microsensors) make up one of the fastest-growing technology areas, with sales of nearly $8.9 billion in 2014 that are expected to grow at a compound annual growth rate (CAGR) of 11.7% between 2015 and 2020.

Microsensors have proven to be a key enabling technology for developments in sectors such as transportation, telecommunications and health care, but the range of microsensors’ applications covers nearly every sector. The most significant advantage of microsensors is their ability to communicate easily with semiconductor chips. Other
advantages include microsensors’ compact size, reduced power consumption, lower cost and increased reliability. The growth in the use of microsensors has also led to the creation of supporting industries in areas such as design software, design services, specialty fabrication equipment and fabrication facilities.

BCC Research has surveyed individual segments of the microsensor industry previously—for example, in its recent studies of the global market for MEMS, automotive sensors, medical device sensors and environmental sensors. BCC Research initiated the present study to bring together these related markets as well as to update
the findings and conclusions of the earlier reports.

The range of microsensor products and applications has grown rapidly in the past few years, but it is important to avoid “hyping” their prospects. Although some types of microsensors (airbag accelerometers, for example) have had great commercial success, other types (such as most types of nanosensors) have enjoyed less success. Still other technologies remain at the discovery and developmental stages, and their eventual commercialization will require the commitment of substantial resources, with long payback periods and substantial financial risk.
To the extent that hype results in exaggerated investor expectation, it can divert investment from microsensor technologies that have real commercial potential. In the worst case, disappointed expectations can lead to a drying up of investment funds, similar to the one that occurred in the dot-com sector after 2000. This report takes a hard look at the market for microsensors and tries to provide a road map for the technologies and applications that are likely to enjoy the greatest commercial success in the years through 2020.




Table Of Contents

MEMS: Biosensors and Nanosensors
CHAPTER 1 INTRODUCTION 2
STUDY BACKGROUND 2
GOALS AND OBJECTIVES 2
INTENDED AUDIENCE 3
SCOPE OF REPORT 3
METHODOLOGY AND INFORMATION SOURCES 4
ANALYST'S CREDENTIALS 4
RELATED BCC RESEARCH REPORTS 5
BCC RESEARCH WEBSITE 5
DISCLAIMER 6
CHAPTER 2 EXECUTIVE SUMMARY 8
SUMMARY TABLE GLOBAL MARKET FOR MICROSENSORS, THROUGH 2020 ($
MILLIONS) 8
SUMMARY FIGURE GLOBAL MARKET TRENDS FOR MICROSENSORS, 2014-2020 ($
MILLIONS) 8
CHAPTER 3 MICROSENSORS OVERVIEW 11
GENERAL DESCRIPTION 11
DEFINITIONS 11
Sensors 11
Microsensors 11
Microelectromechanical Systems (MEMS) 12
Biosensors 12
Nanosensors 13
HISTORICAL PERSPECTIVE 13
MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14
TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14
ACCELEROMETERS 15
GYROSCOPES 15
PRESSURE MICROSENSORS 16
CHEMICAL AND GAS MICROSENSORS 16
THERMAL MICROSENSORS 16
MAGNETIC MICROSENSORS 16
OTHER MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS 17
BIOCHIPS 17
MINIATURE BIOSENSORS 17
NANOCHEMICAL SENSORS 18
NANOFORCE SENSORS 18
NANOBIOSENSORS 18
NANO-RADIATION SENSORS 19
NANO-THERMAL SENSORS 19
MICROSENSOR MARKETS 20
TABLE 2 GLOBAL MARKET FOR MICROSENSORS BY TYPE, THROUGH 2020 ($
MILLIONS) 20
FIGURE 1 GLOBAL MARKET TRENDS FOR MICROSENSORS BY TYPE, 2014-2020 ($
MILLIONS) 20
TABLE 3 GLOBAL MARKET FOR MICROSENSORS BY END USE, THROUGH 2020 ($
MILLIONS) 21
FIGURE 2 GLOBAL SHARE OF MARKET FOR MICROSENSORS BY END USE,
2014-2020 (PERCENT) 22
CHAPTER 4 ENABLING TECHNOLOGIES FOR MICROSENSORS 24
MATERIALS TECHNOLOGIES 24
FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS
TECHNOLOGIES BY TYPE, 2014 AND 2020 (PERCENT OF TOTAL MEMS SHIPMENTS) 24
SILICON 25
POLYMERS 25
METALS 26
NANOMATERIALS 26
Nanoparticles 26
Carbon Nanotubes 27
Graphene 27
Nanoribbons 28
Nanowires 28
Nanoceramics 29
Other Nanostructured Materials 29
MANUFACTURING TECHNOLOGIES 30
MICROMACHINING 30
Surface Micromachining 30
FIGURE 4 SACRIFICIAL LAYER ETCHING 30
Bulk Micromachining 32
LIGA 32
FIGURE 5 LIGA PROCESS DIAGRAM 32
Wafer Bonding 33
Anodic Bonding 33
Intermediate-Layer Assisted Bonding 33
Direct Bonding 34
Flip-Chip Bonding 34
ETCHING 34
Wet Anisotropic Etching 34
FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING 34
Dry Etching 35
Reactive Ion Etching 35
Deep Reactive Ion Etching 35
LASER MICROFABRICATION 36
Laser Micromachining 36
Laser-Assisted Chemical Etching 37
Laser-Assisted Deposition 37
Stereolithography 37
Laser Surface Modification 38
Laser-Assisted Manipulation and Assembly 38
Laser Microbending 38
Physical Manipulation of Parts 38
Laser Joining 38
NANOPATTERNING 39
Nanoimprint Lithography 40
Hot Embossing Lithography 40
Ultraviolet Nanoimprint Lithography 40
Microcontact Printing 41
Dip-Pen Nanolithography 41
Laser-Based Particle Deposition 42
Other Technologies 43
Powder Blasting 43
Micro-Molding 43
CHAPTER 5 ACCELEROMETERS 45
TECHNOLOGIES 45
OPERATING MECHANISM 45
TABLE 4 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER
TECHNOLOGIES 45
Capacitive 46
Electromagnetic 47
Piezoelectric 47
Piezoresistive 47
Optical 48
Tunneling 48
Thermal 49
AXES OF MEASUREMENT 49
LOW-G ACCELEROMETERS 50
APPLICATIONS 50
TABLE 5 COMMERCIAL ACCELEROMETER 50
AUTOMOTIVE 50
Airbag Actuation 50
Stability Systems 51
Vehicle Navigation 51
Other Applications 51
LIFE SCIENCES 51
Rate-Responsive Heart Pacemakers 51
Actigraphs 52
ENERGY 52
Oil and Gas Exploration 52
MILITARY/AEROSPACE 53
INFORMATION TECHNOLOGY 53
Hard Disk Drop Protection 53
CONSUMER PRODUCTS 54
Smart Sporting Goods 54
Personal Electronics 54
MISCELLANEOUS APPLICATIONS 55
ACCELEROMETER MARKET 55
SUMMARY 55
TABLE 6 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
ACCELEROMETERS BY APPLICATION, THROUGH 2020 ($ MILLIONS) 56
FIGURE 7 GLOBAL MARKET SHARE OF MICROELECTROMECHANICAL SYSTEMS
(MEMS) ACCELEROMETERS BY APPLICATION, 2013-2020 (PERCENT OF TOTAL
SHIPMENTS)
56
AUTOMOTIVE APPLICATIONS 57
TABLE 7 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER
APPLICATIONS, THROUGH 2020 ($ MILLIONS) 57
Airbag Sensors 57
TABLE 8 GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2020 (MILLION
UNITS) 58
FIGURE 8 GLOBAL TRENDS IN SHIPMENTS OF AIRBAG MODULES, 2014-2020
(MILLION UNITS) 58
TABLE 9 GLOBAL MARKET FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH
2020 (MILLION UNITS/$ MILLIONS) 59
Vehicle Stability Control Systems 59
TABLE 10 GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY
CONTROL SYSTEMS, THROUGH 2020 (MILLION VEHICLES) 59
FIGURE 9 GLOBAL SALES TRENDS FOR LIGHT VEHICLES WITH STABILITY CONTROL
SYSTEMS, 2014-2020 (MILLION VEHICLES) 59
Navigation Systems 60
TABLE 12 GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS WITH
INTEGRATED INERTIAL NAVIGATION SYSTEMS (INS), THROUGH 2020 (MILLION
VEHICLES)
61
FIGURE 10 GLOBAL SHIPMENT TRENDS FOR VEHICLE IN-DASH NAVIGATION
SYSTEMS, 2014-2020 (MILLION SYSTEMS SHIPPED) 61
TABLE 13 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS WITH INTEGRATED
INERTIAL NAVIGATION SYSTEMS (INS), THROUGH 2020 (MILLION UNITS/$
MILLIONS)q
62
LIFE SCIENCES APPLICATIONS 62
TABLE 14 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN
LIFE SCIENCES, THROUGH 2020 ($ MILLIONS) 62
Rate-Responsive Heart Pacemakers 62
TABLE 15 GLOBAL SALES FOR CARDIAC PACEMAKERS, THROUGH 2020
(THOUSANDS) 63
FIGURE 11 GLOBAL SALES TRENDS FOR CARDIAC PACEMAKERS, 2014-2020
(THOUSAND UNITS) 63
TABLE 16 GLOBAL MARKET FOR ACCELEROMETERS USED IN RATE-RESPONSIVE
HEART PACEMAKERS, THROUGH 2020 (THOUSAND UNITS/$ MILLIONS) 64
Activity Monitoring Systems 64
TABLE 17 GLOBAL MARKET FOR ACCELEROMETERS USED IN ACTIGRAPHS,
THROUGH 2020 (THOUSAND UNITS/$ MILLIONS) 64
ENERGY APPLICATIONS 65
Seismic Detection Systems 65
TABLE 18 GLOBAL MARKET FOR ACCELEROMETERS USED IN SEISMIC DETECTION
EQUIPMENT, THROUGH 2020 (MILLION UNITS/$ MILLIONS) 65
MILITARY/AEROSPACE APPLICATIONS 65
TABLE 19 GLOBAL SALES OF GLOBAL POSITION SYSTEMS (GPS) FOR
MILITARY/AEROSPACE APPLICATIONS, THROUGH 2020 ($ MILLIONS) 66
FIGURE 12 GLOBAL SALES TRENDS FOR GLOBAL POSITION SYSTEMS (GPS) USED
IN MILITARY/AEROSPACE APPLICATIONS, 2014-2020 ($ MILLIONS) 66
TABLE 20 GLOBAL MARKET FOR ACCELEROMETERS USED IN MILITARY/
AEROSPACE APPLICATIONS, THROUGH 2020 (THOUSAND UNITS/$ MILLIONS) 67
INFORMATION TECHNOLOGY APPLICATIONS 67
TABLE 21 GLOBAL MARKET FOR ACCELEROMETERS USED IN INFORMATION
TECHNOLOGY, THROUGH 2020 ($ MILLIONS) 67
Hard Disk Drive Drop Protection 67
TABLE 22 GLOBAL SALES FOR HARD DRIVE-EQUIPPED LAPTOP COMPUTERS,
THROUGH 2020 (MILLION UNITS) 68
FIGURE 13 GLOBAL SALES TRENDS FOR HARD DRIVE-EQUIPPED LAPTOP
COMPUTERS, 2014-2020 (MILLION UNITS) 68
TABLE 23 GLOBAL MARKET FOR ACCELEROMETERS USED IN LAPTOP COMPUTER
HARD DRIVE DISK (HDD) DROP PROTECTION APPLICATIONS, THROUGH 2020
(MILLION UNITS/$ MILLIONS)
69
Hard Disk Read/Write Head Tracking Mechanism 69
TABLE 24 GLOBAL MARKET FOR ACCELEROMETERS USED IN HARD DISK DRIVE
(HDD) READ/WRITE HEAD TRACKING SYSTEMS, THROUGH 2020 (MILLION UNITS/$
MILLIONS)
70
CONSUMER PRODUCTS APPLICATIONS 70
TABLE 25 GLOBAL MARKET FOR ACCELEROMETERS USED IN CONSUMER
PRODUCTS, THROUGH 2020 ($ MILLIONS) 70
Mobile Phone User Interface 70
TABLE 26 GLOBAL SALES FOR MOBILE PHONE HANDSETS, THROUGH 2020
(MILLIONS) 71
FIGURE 14 GLOBAL SALES TRENDS FOR MOBILE PHONE HANDSETS, 2014-2020
(MILLIONS) 71
TABLE 27 GLOBAL MARKET FOR ACCELEROMETERS USED IN MOBILE PHONE
HANDSETS, THROUGH 2020 (MILLION UNITS/$ MILLIONS) 72
Electronic Gaming User Interface 72
TABLE 28 GLOBAL MARKET FOR ACCELEROMETERS USED IN HANDHELD GAMING
DEVICES, THROUGH 2020 (MILLION UNITS/$ MILLIONS) 72
Digital Camera Image-Stabilization Systems 72
TABLE 29 GLOBAL SALES FOR DIGITAL CAMERAS, THROUGH 2020 (MILLIONS) 73
FIGURE 15 GLOBAL SALES TRENDS FOR DIGITAL CAMERAS, 2014-2020 (MILLION
UNITS) 73
TABLE 30 GLOBAL MARKET FOR ACCELEROMETERS USED IN DIGITAL CAMERA
IMAGE-STABILIZATION SYSTEMS, THROUGH 2020 (MILLION UNITS/$ MILLIONS) 74
Smart Sporting Goods 74
TABLE 31 GLOBAL MARKET FOR ACCELEROMETERS USED IN "SMART" SPORTING
GOODS, THROUGH 2020 ($ MILLIONS) 74
TABLE 32 GLOBAL MARKET FOR ACCELEROMETERS USED IN RUNNING SHOE
SENSORS, THROUGH 2020 (THOUSAND UNITS/$ MILLIONS) 75
TABLE 33 GLOBAL MARKET FOR ACCELEROMETERS USED IN FITNESS AND HEALTH
SELF-MONITORING DEVICES, THROUGH 2020 (THOUSAND UNITS/$ MILLIONS) 75
OTHER APPLICATIONS 75
TABLE 34 GLOBAL MARKET FOR ACCELEROMETERS USED IN OTHER COMMERCIAL
APPLICATIONS, THROUGH 2020 (MILLION UNITS/$ MILLIONS) 76
CHAPTER 6 GYROSCOPES 78
TECHNOLOGIES 78
TABLE 35 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPE
TECHNOLOGIES 78
TUNING FORK GYROSCOPES 79
WINE GLASS RESONATOR GYROSCOPES 79
RING RESONATOR GYROSCOPES 79
VIBRATING WHEEL GYROSCOPES 80
SPINNING-WHEEL GYROSCOPES 80
MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROSCOPES 80
Interferometric Micro-Optical-Electromechanical Systems (MOEMS)
Gyroscopes 80
APPLICATIONS 81
TABLE 36 GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS)
APPLICATIONS 81
AUTOMOTIVE 81
Vehicle Stabilization Systems 81
Rollover Detection 82
Vehicle Navigation Systems 82
LIFE SCIENCES 82
CONSUMER PRODUCTS 83
Digital Camera Image-Stabilization Systems 83
Personal Transportation Devices 83
Fitness and Health Self-Monitoring Devices 83
Robotic Toys 83
Household Robots 84
MILITARY/AEROSPACE 84
OTHER APPLICATIONS 84
Mobile Industrial/Service Robots 84
GYROSCOPE MARKET 84
SUMMARY 84
TABLE 37 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
GYROSCOPES BY APPLICATION, THROUGH 2020 ($ MILLIONS) 85
FIGURE 16 GLOBAL MARKET SHARE OF MICROELECTROMECHANICAL SYSTEMS
(MEMS) GYROSCOPES BY APPLICATION, 2014-2020 (% OF TOTAL SHIPMENTS) 85
AUTOMOTIVE 86
TABLE 38 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) IN AUTOMOTIVE APPLICATIONS, THROUGH 2020 ($ MILLIONS) 86
Stability Control 86
TABLE 39 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH
2020 (MILLION UNITS/$ MILLIONS)
87
Rollover Detection 87
FIGURE 17 GLOBAL SALES TRENDS FOR VEHICLES WITH ROLLOVER DETECTION
SYSTEMS, 2014-2020 (MILLION UNITS) 87
TABLE 40 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH
2020 (MILLION UNITS/$ MILLIONS)
88
Navigation Systems 88
TABLE 41 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2020
(MILLION UNITS/$ MILLIONS)
89
CONSUMER PRODUCTS 89
TABLE 42 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN CONSUMER PRODUCTS, THROUGH 2020 ($ MILLIONS) 89
Digital Camera Image-Stabilization Systems 89
TABLE 43 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS,
THROUGH 2020 (MILLION UNITS/$ MILLIONS)
90
Personal Transportation Devices 90
FIGURE 18 GLOBAL SALES TRENDS FOR SEGWAY HUMAN TRANSPORTERS,
2014-2020 (UNITS) 91
TABLE 44 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2020
(THOUSAND UNITS/$ MILLIONS)
91
MILITARY/AEROSPACE 92
TABLE 45 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2020
(MILLION UNITS/$ MILLIONS)
92
OTHER APPLICATIONS 92
Mobile Industrial/Service Robots 92
FIGURE 19 GLOBAL SHIPMENT TRENDS FOR MOBILE INDUSTRIAL/SERVICE ROBOTS,
2014-2020 (THOUSAND UNITS) 92
TABLE 46 GLOBAL MARKET FOR GYROSCOPIC MICROELECTROMECHANICAL
SYSTEMS (MEMS) USED IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2020
(UNITS/$ MILLIONS)
94
CHAPTER 7 PRESSURE SENSORS 96
TECHNOLOGY 96
APPLICATIONS 96
TABLE 47 ESTABLISHED PRESSURE-SENSING MICROELECTROMECHANICAL
SYSTEMS (MEMS) APPLICATIONS 96
AUTOMOTIVE APPLICATIONS 96
Manifold Absolute Pressure (MAP) Sensors 97
Tire Pressure Sensors 97
LIFE SCIENCES APPLICATIONS 97
Blood Pressure Monitors 97
CONSUMER PRODUCTS APPLICATIONS 97
Appliance Pressure Sensors 97
OTHER APPLICATIONS 98
PRESSURE SENSOR MARKET 98
SUMMARY 98
TABLE 48 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
PRESSURE SENSOR APPLICATIONS, THROUGH 2020 ($ MILLIONS) 98
FIGURE 20 GLOBAL MARKET SHARE OF MICROELECTROMECHANICAL SYSTEMS
(MEMS) PRESSURE SENSORS BY APPLICATION, 2014-2020 (PERCENT OF TOTAL
SHIPMENTS)
98
AUTOMOTIVE 99
TABLE 49 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE
MICROELECTRO-MECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS,
THROUGH 2020 ($ MILLIONS)
100
Manifold Absolute Pressure Sensors 100
TABLE 50 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2020 (MILLION UNITS/$
MILLIONS)
100
Tire Pressure Sensors 100
TABLE 51 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2020 (MILLION UNITS/$
MILLIONS)
101
LIFE SCIENCES 101
Blood Pressure Monitors 101
TABLE 52 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
BLOOD PRESSURE SENSORS, THROUGH 2020 (MILLION UNITS/$ MILLIONS) 102
CONSUMER PRODUCTS 102
Appliance Pressure Sensors 102
TABLE 53 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
PRESSURE SENSORS USED IN HOME APPLIANCES, THROUGH 2020 (MILLION
UNITS/$ MILLIONS)
102
CHAPTER 8 CHEMICAL AND GAS SENSORS 104
TECHNOLOGIES 104
ELECTROCHEMICAL SENSORS 104
MASS SENSORS 104
OPTICAL SENSORS 105
APPLICATIONS 105
TABLE 54 MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS
SENSOR APPLICATIONS 105
AUTOMOTIVE 106
Exhaust and Cabin Air-Quality Sensors 106
LIFE SCIENCES 106
Blood Gas Monitors 106
ENVIRONMENTAL PROTECTION 106
Portable/Personal Air-Quality Detectors 106
MILITARY/PUBLIC SAFETY 106
Chemical Agent Detectors 106
OTHER APPLICATIONS 107
Industrial Leak Detection and Process Control 107
MARKETS 107
TABLE 55 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
CHEMICAL AND GAS SENSORS BY APPLICATION, THROUGH 2020 ($ MILLIONS) 107
FIGURE 21 GLOBAL MARKET SHARES OF MICROELECTROMECHANICAL SYSTEMS
(MEMS) CHEMICAL AND GAS SENSORS BY APPLICATION, 2014-2020 (PERCENT OF
TOTAL SHIPMENTS)
108
AUTOMOTIVE 109
TABLE 56 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2020 ($ MILLIONS) 109
Exhaust Gas and Cabin Air-Quality Sensors 109
TABLE 57 GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC
CONVERTERS, THROUGH 2020 ($ MILLIONS) 110
FIGURE 22 GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC
CONVERTERS, 2014-2020 (MILLION UNITS) 110
LIFE SCIENCES 111
Blood Gas Monitors 111
TABLE 58 GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2020 (UNITS) 111
FIGURE 23 GLOBAL SALES TRENDS FOR BLOOD GAS MONITORS, 2014-2020
(UNITS) 111
TABLE 59 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
BLOOD GAS SENSORS, THROUGH 2020 (UNITS/$ MILLIONS) 112
ENVIRONMENTAL PROTECTION 112
Air-Quality Monitoring 112
TABLE 60 GLOBAL MARKET FOR AIR POLLUTION MONITORING EQUIPMENT,
THROUGH 2020 ($ MILLIONS) 112
FIGURE 24 GLOBAL MARKET TRENDS FOR AIR POLLUTION MONITORING AND
SENSING EQUIPMENT, 2014-2020 ($ MILLIONS) 113
TABLE 61 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
USED IN PORTABLE/PERSONAL AIR-QUALITY MONITORS, THROUGH 2020 (UNITS/$
MILLIONS)
114
MILITARY/PUBLIC SAFETY 114
Chemical Agent Detectors 114
TABLE 62 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
USED IN PORTABLE CHEMICAL WARFARE (CW) AGENT DETECTORS, THROUGH
2020 (THOUSAND UNITS/$ MILLIONS)
114
PROCESS INDUSTRIES 115
Industrial Process Control and Leak Detection 115
TABLE 63 GLOBAL MARKET FOR OTHER TYPES OF MICROELECTROMECHANICAL
SYSTEMS (MEMS) INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2020 ($
MILLIONS)
115
CHAPTER 9 THERMAL SENSORS 117
TECHNOLOGIES 117
THERMOCOUPLES 117
THERMORESISTORS 117
MICROBOLOMETERS 117
MICROCANTILEVERS 118
OTHER TECHNOLOGIES 118
APPLICATIONS 119
AUTOMOTIVE 119
MILITARY/PUBLIC SAFETY 119
OTHER 120
MARKETS 120
TABLE 64 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
THERMAL SENSORS BY APPLICATION, THROUGH 2020 (THOUSAND UNITS/$
MILLIONS)
120
FIGURE 25 GLOBAL MARKET SHARE OF MICROELECTROMECHANICAL SYSTEMS
(MEMS) THERMAL SENSORS BY APPLICATION, 2014-2020 (% OF TOTAL SHIPMENTS) 120
MILITARY/PUBLIC SAFETY 121
TABLE 65 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
THERMAL SENSORS USED IN MILITARY/PUBLIC SAFETY, THROUGH 2020
(THOUSAND UNITS/$ MILLIONS)
122
AUTOMOTIVE 122
Night-Vision Systems 122
TABLE 66 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
THERMAL SENSORS USED IN AUTO NIGHT-VISION SYSTEMS, THROUGH 2020
(THOUSAND UNITS/$ MILLIONS)
123
OTHER APPLICATIONS 123
TABLE 67 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
THERMAL SENSORS IN OTHER APPLICATIONS, THROUGH 2020 ($ MILLIONS) 123
CHAPTER 10 MAGNETIC SENSORS 125
TECHNOLOGIES 125
RESONANT SENSORS 125
FLUXGATE SENSORS 125
HALL SENSORS 125
GIANT MAGNETORESISTIVE SENSORS 126
MAGNETIC TUNNELING JUNCTION SENSORS 126
ANISOTROPIC MAGNETORESISTIVE (AMR) MAGNETIC SENSORS 126
APPLICATIONS 127
TABLE 68 MAGNETIC SENSOR APPLICATIONS 127
AUTOMOTIVE 127
LIFE SCIENCES 127
CONSUMER PRODUCTS 128
OTHER APPLICATIONS 128
MARKETS 128
TABLE 69 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
MAGNETIC SENSORS BY APPLICATION, THROUGH 2020 ($ MILLIONS) 128
FIGURE 26 GLOBAL MARKET SHARE OF MICROELECTROMECHANICAL SYSTEMS
(MEMS) MAGNETIC SENSORS BY APPLICATION, 2014-2020 (% OF TOTAL
SHIPMENTS)
129
AUTOMOTIVE 130
LIFE SCIENCES 130
CONSUMER PRODUCTS 130
OTHER APPLICATIONS 130
CHAPTER 11 OTHER MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS 132
TABLE 70 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
STRAIN SENSORS BY APPLICATION, THROUGH 2020 ($ MILLIONS) 132
CHAPTER 12 BIOCHIPS 134
TECHNOLOGIES 134
SAMPLE MANIPULATION TECHNOLOGIES 134
Microchannels 134
Micropumps 135
Mechanical Micropumps 135
Piezoelectric Pumps 135
Pneumatic Pumps 135
Thermopneumatic Pumps 135
Electrostatic Pumps 136
Nonmechanical Pumps 136
Capillary Pumps 136
Electrohydrodynamic Pumps 136
Electrokinetic Pumps 136
Magneto-Hydrodynamic Pumps 137
Phase Difference Pumps 137
Micronozzles 137
Microvalves 137
Passive Microvalves 138
Active Microvalves 138
Micromixers 138
Active Mixers 138
Surface Acoustic Wave (SAW) Mixers 138
Magneto-Hydrodynamic Mixers 138
Passive Mixers 139
Microreactors 139
SENSING MEDIATOR 139
Enzyme Biochips 139
Affinity Biochips 139
TRANSDUCER 140
APPLICATIONS 140
TABLE 71 BIOCHIP APPLICATIONS 140
LIFE SCIENCES 140
MILITARY/PUBLIC SAFETY 141
Chemical and Biological Agent Detectors 141
PROCESS INDUSTRIES 142
Food Quality Testing 142
MARKETS 142
TABLE 72 GLOBAL MARKET FOR BIOCHIPS BY APPLICATION, THROUGH 2020 ($
MILLIONS) 142
FIGURE 27 GLOBAL MARKET SHARE OF BIOCHIPS BY APPLICATION, 2014-2020 (%
OF TOTAL SHIPMENTS) 143
LIFE SCIENCES 143
TABLE 73 GLOBAL MARKET FOR BIOCHIPS IN LIFE SCIENCES BY APPLICATION,
THROUGH 2020 ($ MILLIONS) 144
Life Sciences Research 144
TABLE 74 GLOBAL MARKET FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH
APPLICATIONS, THROUGH 2020 ($ MILLIONS) 144
Diagnostic Biochips 144
TABLE 75 GLOBAL MARKET FOR BIOCHIPS IN LAB-ON-A-CHIP (LOC) DIAGNOSTIC
DEVICES, THROUGH 2020 ($ MILLIONS) 145
MILITARY/PUBLIC SAFETY 145
TABLE 76 GLOBAL MARKET FOR MICROFLUIDIC BIOCHIPS USED IN CHEMICAL AND
BIOLOGICAL WARFARE (CBW) SENSORS, THROUGH 2020 ($ MILLIONS) 145
PROCESS INDUSTRIES 146
Food Testing 146
TABLE 77 GLOBAL MARKET FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS,
THROUGH 2020 ($ MILLIONS) 146
CHAPTER 13 NANOCHEMICAL SENSORS 148
TECHNOLOGIES 148
TABLE 78 NANOCHEMICAL SENSOR TECHNOLOGIES 148
NANOTUBES 149
Carbon Nanotubes 149
Other Types of Nanotubes 150
NANORIBBONS 150
NANOWIRES 151
NANOCANTILEVERS 151
NANOPARTICLES 152
NANOCERAMICS 153
GRAPHENE SENSORS 153
APPLICATIONS 154
TABLE 79 NANOCHEMICAL SENSOR APPLICATIONS 154
LIFE SCIENCES 155
Respiratory Monitoring 155
PROCESS INDUSTRIES 155
Leak Detection 156
MARKET 156
TABLE 80 GLOBAL SALES OF NANOCHEMICAL SENSORS BY APPLICATION,
THROUGH 2020 ($ MILLIONS) 156
CHAPTER 14 NANOFORCE SENSORS 158
TECHNOLOGIES 158
APPLICATIONS 159
LIFE SCIENCES 159
INFORMATION TECHNOLOGY 159
OTHER APPLICATIONS 159
MARKETS 160
TABLE 81 GLOBAL SALES OF NANOFORCE SENSORS (ATOMIC FORCE
MICROSCOPES) BY APPLICATION, THROUGH 2020 ($ MILLIONS) 160
CHAPTER 15 NANOBIOSENSORS 162
TECHNOLOGIES 162
TABLE 82 NANOBIOSENSOR TECHNOLOGIES 162
SILICON NANOWIRES 163
NANOCANTILEVERS 163
FIBER OPTIC 163
NANOTUBES 164
NANOSTRUCTURED MEMBRANE 164
PHOSPHOLIPIDS 165
DNA-SENSITIZED GRAPHENE VAPOR SENSORS 166
NANOGAP SENSOR ARRAY 166
APPLICATIONS 166
TABLE 83 NANOBIOSENSOR APPLICATIONS 167
LIFE SCIENCES 167
Molecular Diagnostics 167
MARKETS 167
LIFE SCIENCES 167
TABLE 84 GLOBAL SALES OF NANOBIOSENSORS TO THE LIFE SCIENCES MARKET,

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