INTRODUCTION
STUDY GOALS AND OBJECTIVES
BCC Research has followed the thick and thin film markets for more than 10 years, publishing various reports on materials, devices and technologies used to deposit these types of films. During this period, the market has expanded steadily and new opportunities have developed for these films.
With this study, BCC Research continues its commitment to monitoring the thin film market by providing an updated review of the most important advances in thin film technology. In addition, BCC provides a detailed overview of the current market and an impartial analysis of prospects for future growth, with a focus on the raw materials used to produce thin films and nanofilms.
Specifically, the major objectives of this study are:
Provide an update on the most advanced processes employed for the fabrication of thin and ultrathin films.
Provide an overview of the most common materials used for each thin film deposition process and identify new materials.
Highlight new technological developments in the fabrication of thin films, while outlining technical issues.
Review the several fields of application for thin film technologies and investigate emerging applications.
Estimate current worldwide markets for thin film materials, and forecast the growth for each market segment through 2016.
Identify important technology and market trends within each market segment.
Supply an updated review of current producers of thin film materials.
Determine trends in U.S. patents and worldwide patents issued during the most recent years.
REASONS FOR DOING THIS STUDY
The global market for thin film technologies (including equipment, materials and services) is currently valued at more than $50 billion and continues to grow. On-going miniaturization in the semiconductor industry also impacts other sectors. As a result, there is a continuous effort to create components and products that are smaller, thinner, lighter and also, for certain applications, flexible. In addition, new developments in nanotechnology are also contributing to advances in materials and fabrication methods for producing very thin films, that is, those films below 30 nanometers or those with a thickness measured in atoms.
There are various types of thin film materials (e.g., metals, alloys, oxides, non-oxides, metalorganics and metal salts). These materials can be deposited by a variety of physical or chemical methods, and they find application in the fabrication process of numerous devices within several industrial sectors (including electronics, optoelectronics, mechanical/chemical, energy, optical coatings, life science and decorative coatings).
At the time of BCC’s last report (2004), the global market for thin film materials was valued at $7.1 billion and growing at a fairly rapid pace. Since then, the industry has continued to evolve in important ways. In addition, at the end of 2007, growth in the global economy began to slow dramatically along with many sectors in which these materials are used, leading to a steep drop in sales during the ensuing two years.
The principal reason for doing this study is to present a current assessment of the thin film material industry from both technological and market viewpoints and to outline future trends and key developments.
There is also a need to evaluate the current status and future trends of the thin film material industry from a global standpoint. As use of these materials expands and new fields of application emerge, information on regional production, sales and type of suppliers becomes more valuable.
An equally important reason for undertaking this study is to provide technical insights into thin film manufacturing by:
Offering a review of material types, their applications and deposition methods.
Providing an overview of the main global R&D activities, resulting in the issuance of patents, and related to thin film technology.
Illustrating the latest technological developments.
This information can assist companies in identifying opportunities for process and productivity improvements, resulting in a positive impact on future market growth.
INTENDED AUDIENCE
This study will be of primary interest to all companies that
Manufacture, sell and distribute materials for producing thin films.
Fabricate thin film devices or coated products.
Offer coating services to the thin film industry.
Manufacture processing and characterization equipment (e.g., physical vapor deposition equipment, chemical vapor deposition equipment and analytical instruments) utilized by producers of thin films.
Provide technical and/or marketing services for the thin film industry.
Plan to enter the thin film industry as a supplier, manufacturer or end user.
This study applies to industry segments such as microelectronics, data storage media, advanced displays, mechanical/chemical, energy, optical coatings, life sciences and the general coating sector.
The study is directed mainly toward executives, directors, operations managers, sales and marketing managers and strategic planners working within the above industries. Universities and research facilities may also find this study to be a good source of technical information regarding thin film technology, materials and equipment, which can be used as a baseline for new or expanded R&D activities. Librarians of technical information and research centers can also use this report to provide critical data to product managers, market analysts, researchers and other professionals who need detailed and updated analysis of the thin film industry.
SCOPE OF REPORT
This study provides an updated review of thin film technologies, including materials and production processes, and it identifies current and emerging applications for these technologies.
BCC Research determines the current market status for thin film materials, defines trends and presents forecasts of growth over the next five years. The thin film material industry is also analyzed on a worldwide basis from the standpoint of both manufacturing and consumption. In addition, technological issues, including the latest process developments and events, are discussed.
More specifically, BCC’s market analysis is divided into six main parts. In the first part, a historical review of thin film technology is provided, including an outline of recent events. The report also supplies a description of current and emerging applications for thin and ultrathin films.
The second part of the study provides a technological review of thin film deposition processes, free-standing thin films and materials used to manufacture thin and ultrathin films. Each of the three sections concludes with an analysis of the most important technological developments and improvements since 2009, including examples of significant patents recently issued or applied for. This part of the study also offers a brief discussion of the most relevant technological trends related to the materials used for thin film deposition.
The third part of the report entails a global market analysis of materials for thin and ultrathin films. Global revenues (sales data in millions of dollars) are presented by application, deposition technology, film thickness and region, with actual data referring to the years 2009 and 2010, and estimates for 2011.
This section concludes with a presentation of market growth trends, based on industry growth, technological trends and regional trends. Projected revenues are reported, with forecast compound annual growth rates (CAGR) for the period 2011 through 2016.
Next, six optional sections are offered. These sections provide a more focused discussion of the thin film materials market for the six main sectors in which thin films are typically applied (specifically: electronics, optoelectronics, mechanical/chemical, energy, optical coatings and life sciences and others). In these optional sections, additional details by sector on current market conditions and key trends and developments are provided, in addition to market growth projections for each sector.
In the next part of the study that covers global industry structure, the report offers a list of the leading manufacturers of thin film materials, together with a description of their products. The analysis includes a description of the geographical distribution of these suppliers and an evaluation of thin film material production versus consumption, always from a geographical standpoint. Detailed company profiles of the top industry players are also provided.
The final part of the report includes an extensive U.S. patent analysis, with a summary of patents related to thin film materials, deposition methods and applications issued in 2011. Patent analysis is performed by region, country, assignee, patent category and deposition process.
METHODOLOGY AND INFORMATION SOURCES
To analyze the overall market and market segments, both primary and secondary research methodologies were used to obtain market data.
The technology section of this report is based on information derived from technical literature, related BCC reports, professional journals, the author’s field experience and online sources.
Global market analysis was performed by analyzing 372 producers of materials for making thin films, accounting for at least 95% of the global market. Data for each company were obtained by thoroughly analyzing Security and Exchange Commission (SEC) filings, Internet websites, annual reports, industry directories, industry magazines and catalogs, government sources and other public sources.
Additional data were obtained from the direct contribution of primary sources, including company executives, managers, engineers and other technical personnel representing manufacturers, developers and users of thin film materials, process equipment and devices; representatives of academia and trade associations; and industry market analysts.
Secondary sources of information include:
EDGAR – U.S. Securities and Exchange Commission filings.
U.S. Patent and Trademark Office.
European Patent Office.
Company websites.
Company annual reports.
Thomas Register.
Moody’s Directory.
S & P Industry Survey.
Dun & Bradstreet Business Directory.
American Ceramic Society Publications.
Foreign Chamber of Commerce Directories.
Foreign Stock Exchange Listings.
In addition to utilizing the above primary and secondary sources, market growth trends and forecasts were compiled by gaining additional insights from relevant financial and market information, relevant BCC reports and the author’s own in-depth and comprehensive analysis of the collected information.
ANALYST CREDENTIALS
Margareth Gagliardi, BCC’s chief research analyst in advanced materials, has more than 25 years of experience in the field of advanced materials, specializing in ceramic formulations, materials processing and new product development. She has held management positions in both manufacturing and R&D within U.S. and European firms producing electronic, mechanical, chemical and structural components. She holds a B.S. in Chemical Engineering and an M.S. in Ceramic Engineering.
Ms. Gagliardi has authored numerous BCC Research studies, including the following that are related to advanced materials and electronics.
AVM018G Rare Earths: Worldwide Markets, Applications, Technologies, 2012.
SMC037E Sputtering Targets and Sputtered Films: Technology and Markets, 2011.
SMC070A Paper-thin Displays: Technologies and Global Markets, 2011.
EGY068A Supercapacitors: Technology Developments and Global Markets, 2010.
AVM014D Ceramic Matrix Composites: Technologies and Global Markets, 2010.
NAN043B Nanofibers: Technologies and Developing Markets, 2010.
NAN048A Nanotechnology in Coatings and Adhesive Applications: Global Markets, 2010.
AVM069A Photocatalysts: Technologies and Global Markets, 2010.
SMC061B Atomic Layer Deposition, 2010.
AVM046B Thick Film Devices, Processes and Applications, 2010.
AVM018F Rare Earths: Worldwide Markets, Applications, Technologies, 2009.
AVM052B Aerogels, 2009.
AVM065A Smart Glass: Technologies and Global Markets, 2009.
AVM047B Chemical Mechanical Polishing (CMP) Equipment and Materials, 2008.
Global Paint And Coating Industry
TABLE OF CONTENTS
CHAPTER ONE: INTRODUCTION 1
STUDY GOALS AND OBJECTIVES . 1
REASONS FOR DOING THIS STUDY . 1
INTENDED AUDIENCE 2
SCOPE OF REPORT 3
METHODOLOGY AND INFORMATION SOURCES. 4
RELATED BCC RESEARCH STUDIES . 5
RELATED BCC RESEARCH STUDIES (CONTINUED) 6
ANALYST CREDENTIALS 7
BCC ONLINE SERVICES 7
DISCLAIMER . 8
CHAPTER TWO: EXECUTIVE SUMMARY . 9
EXECUTIVE SUMMARY . 9
SUMMARY TABLE GLOBAL MARKET FOR THIN FILM MATERIALS,
THROUGH 2016 ($ MILLIONS) . 10
SUMMARY FIGURE GLOBAL MARKET FOR THIN FILM MATERIALS,
2009–2016 ($ MILLIONS) . 11
CHAPTER THREE: OVERVIEW 12
COATINGS AND FILMS 12
THICK, THIN AND ULTRATHIN FILMS 12
MILESTONES IN THE HISTORY OF THIN FILM TECHNOLOGY
AND RECENT EVENTS . 13
TABLE 1 THIN FILM DEPOSITION TECHNOLOGICAL MILESTONES . 14
TABLE 1 (CONTINUED) 15
FIGURE 1 THIN FILMS: WORLDWIDE PATENT APPLICATIONS AND
PATENTS, 1971-2010 16
APPLICATIONS FOR THIN AND ULTRATHIN FILMS 17
ELECTRONICS 17
OPTOELECTRONICS . 17
MECHANICAL/CHEMICAL . 18
ENERGY . 18
OPTICAL COATINGS . 18
LIFE SCIENCES AND OTHERS 18
TABLE 2 APPLICATIONS OF THIN AND ULTRATHIN FILMS, 2011 19
CHAPTER FOUR: TECHNOLOGIES AND MATERIALS FOR THIN AND
ULTRATHIN FILMS . 20
INTRODUCTION . 20
THIN FILM COATINGS 20
TABLE 3 BASIC CONSTRUCTION STEPS OF A THIN FILM DEVICE 20
SUBSTRATE SELECTION . 21
TABLE 4 SUBSTRATE MATERIALS FOR THIN AND ULTRATHIN
FILMS, 2011 . 21
TABLE 4 (CONTINUED) . 22
THIN FILM DEPOSITION 22
PATTERNING AND FINISHING . 23
THIN FILM DEPOSITION PROCESSES . 23
PHYSICAL PROCESSES 23
CHEMICAL PROCESSES . 23
HYBRID PROCESSES . 24
TABLE 5 THIN FILM TECHNOLOGIES, 2011 . 24
TABLE 5 (CONTINUED) . 25
TABLE 5 (CONTINUED) . 26
TABLE 5 (CONTINUED) . 27
DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS 27
TABLE 6 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS,
2011. 28
LATEST TECHNOLOGICAL DEVELOPMENTS FROM 2009
TO PRESENT . 28
Thin Film Technologies . 29
Reactive High-Power Impulse Magnetron
Sputtering 29
Hybrid Chemical Vapor Deposition . 29
Microwave-Assisted Rotatable PVD 30
Capacitive-Coupled Magnetic Neutral Loop Plasma
Sputtering System . 31
High-Power Impulse Ionized PVD . 31
Low-Temperature High-Power Impulse Magnetron
Sputtering 32
Modulated Ion-Induced Atomic Layer Deposition . 33
Catalyst-Enhanced Chemical Vapor Deposition . 33
Ultrathin Film Technologies . 34
Ultrathin Films by Exfoliation . 34
Field-Aided Preferential Deposition 34
Printable Ultrathin Films 35
Electroless Plating with Silane-Based Catalyst 36
Pulsed Plasma-Enhanced Chemical Vapor
Deposition 37
FREE-STANDING THIN FILMS 38
THIN FILM DEPOSITION AND FILM RELEASE . 38
Peeling 38
Lift-Off 38
Laser Lift-Off . 38
Substrate Compression . 39
VACUUM FILTRATION . 39
FLOW COATING . 39
TABLE 7 METHODS FOR FABRICATION OF FREE-STANDING THIN
FILMS . 39
TABLE 8 FREE-STANDING THIN FILMS: FILM COMPOSITION AND
APPLICATIONS 40
LATEST TECHNOLOGICAL DEVELOPMENTS FROM 2009
TO PRESENT . 41
Chemical Release of Free-Standing Single-Walled Carbon
Nanotube Films 41
Free-standing Single Walled Carbon Nanotube Thin
Films Formed by Direct Dry Printing Process 41
Large-Area, Free-Standing Zinc Oxide Thin Films . 42
Process for Manufacturing Free-Standing Ultrathin
Carbon Nanotube Films . 42
THIN FILM MATERIALS 43
PHYSICAL PROCESSES 44
TABLE 9 PHYSICAL PROCESSES: TYPICAL DEPOSITION
MATERIALS FOR THIN FILMS, 2011 . 44
TABLE 9 (CONTINUED) . 45
TABLE 9 (CONTINUED) . 46
TABLE 9 (CONTINUED) . 47
TABLE 9 (CONTINUED) . 48
TABLE 9 (CONTINUED) . 49
CHEMICAL PROCESSES . 49
Chemical Vapor Deposition . 50
TABLE 10 CHEMICAL VAPOR DEPOSITION: MATERIALS FOR THIN
FILMS, 2011 . 50
Functional Group Sources 50
Metal Sources 51
Metal Hydrides and Halides. 51
Metalorganic Precursors . 52
Metalorganic … (Continued) . 53
TABLE 11 COMMON METALORGANIC PRECURSORS, 2011 . 54
TABLE 11 (CONTINUED) 55
Chemical Solution Deposition . 55
Sol-gel Methods . 55
Organic-Inorganic Hybrids . 56
TABLE 12 CHEMICAL SOLUTION DEPOSITION: MATERIALS FOR
THIN FILMS, 2011 56
TABLE 12 (CONTINUED) . 57
Plating Type Methods . 57
Electroplating 57
Electroless Plating 58
Electrophoretic Deposition . 58
TABLE 13 PLATING TYPE METHODS: MATERIALS FOR THIN
FILMS, 2011 . 59
Other Chemical Processes . 59
Liquid Phase Epitaxy . 60
Liquid Phase Deposition . 60
Interfacial Polymerization 60
Langmuir-Blodgett Deposition . 60
Self-Assembled Monolayer Deposition . 61
Layer-by-Layer Assembly . 61
Flame Hydrolysis 62
Spray Pyrolysis . 62
Laser Reactive Deposition 62
TABLE 14 OTHER CHEMICAL PROCESSES: MATERIALS FOR THIN
FILMS, 2011 . 63
LATEST TECHNOLOGICAL DEVELOPMENTS FROM 2009
TO PRESENT . 63
Silver Precursor for Doping Free-Standing Carbon
Nanotube Films 63
Silver Precursor for Doping … (Continued) . 64
Diimine Copper Complexes for Atomic Layer Deposition . 65
Precursors Containing Electron Donating Group-
Substituted Alkenyl Ligands for Chemical Vapor
Deposition . 65
Phosphoamidinate Precursors for Chemical Vapor
Deposition . 66
Organometallic Precursors for High-Purity Metal Films
formed by CVD . 66
Sputtering Targets Based on Carbon Nanotubes 67
Electroplating Solutions for Solar Cells . 67
Electroplating Solutions … (Continued) 68
Copper Sputtering Targets for Microelectronics and
Optoelectronics . 69
Alternative Sputtering Target Materials for Transparent
Conductive Films 69
Polymeric Precursors for Printing Thin Films for Solar
Cells 70
Precursors for Chemical Vapor Deposition of High-K
Films . 71
TECHNOLOGICAL TRENDS FOR THIN FILM MATERIALS 72
CHAPTER FIVE: GLOBAL MARKETS 73
ANALYSIS OUTLINE 73
GLOBAL MARKET SUMMARY 74
TABLE 15 GLOBAL MARKET FOR THIN FILM MATERIALS,
THROUGH 2016 ($ MILLIONS) . 75
FIGURE 2 GLOBAL MARKET FOR THIN FILM MATERIALS, 2011–
2016 ($ MILLIONS) . 75
CURRENT MARKET STATUS 75
CURRENT MARKET SUMMARY 76
TABLE 16 GLOBAL MARKET FOR THIN FILM MATERIALS,
THROUGH 2011 ($ MILLIONS) . 76
FIGURE 3 GLOBAL MARKET FOR THIN FILM MATERIALS, 2009–
2011 ($ MILLIONS) 76
Revenues by Deposition Technology . 77
TABLE 17 THIN FILM MATERIALS: GLOBAL REVENUES BY
DEPOSITION TECHNOLOGY, THROUGH 2011 ($ MILLIONS) 78
FIGURE 4 THIN FILM MATERIALS: MARKET SHARE BY
DEPOSITION TECHNOLOGY, 2011 (%) . 78
FIGURE 4 (CONTINUED) 79
Revenues by Application . 79
TABLE 18 THIN FILM MATERIALS: GLOBAL REVENUES BY
APPLICATION, THROUGH 2011 ($ MILLIONS) 80
FIGURE 5 THIN FILM MATERIALS: MARKET SHARE BY
APPLICATION, 2011 (%) 81
Revenues by Film Thickness . 81
TABLE 19 THIN FILM MATERIALS: GLOBAL REVENUES BY FILM
THICKNESS, 2009 THROUGH 2011 ($ MILLIONS) 82
Revenues by Region . 82
TABLE 20 THIN FILM MATERIALS: REVENUES BY REGION,
THROUGH 2011 ($ MILLIONS) 83
FIGURE 6 THIN FILM MATERIALS: MARKET SHARE BY REGION,
2011 (%) 83
FIGURE 6 (CONTINUED) 84
MARKET GROWTH TRENDS . 84
INDUSTRY GROWTH . 84
Electronics 84
Semiconductors . 84
TABLE 21 FORECAST - SEMICONDUCTORS: REVENUES BY
REGION, THROUGH 2016 ($ BILLIONS) . 85
Printed Circuits and Other Interconnecting
Components . 85
TABLE 22 FORECAST - PRINTED CIRCUITS AND OTHER
INTERCONNECTING COMPONENTS: REVENUES BY REGION,
THROUGH 2016 ($ BILLIONS) . 86
Data Storage Devices 86
Solid State Drives . 86
Internet Downloads and Cloud Computing . 87
Hard Disk Drive Market Growth . 87
TABLE 23 FORECAST - HARD DISK DRIVES: GLOBAL PRODUCTION
BY TYPE, THROUGH 2016 (MILLION UNITS) . 88
FIGURE 7 FORECAST – HARD DISK DRIVES: PRODUCTION SHARE
BY TYPE, 2016 (% UNITS) . 88
Optical Storage Media Market Growth . 89
TABLE 24 FORECAST – OPTICAL STORAGE MEDIA: GLOBAL
PRODUCTION BY TYPE, THROUGH 2016 (MILLION UNITS) 89
FIGURE 8 FORECAST – OPTICAL STORAGE MEDIA: PRODUCTION
SHARE BY TYPE, 2016 (% UNITS) 90
Optoelectronics 90
TABLE 25 FORECAST – ADVANCED DISPLAYS: GLOBAL REVENUES
BY TYPE, THROUGH 2016 ($ BILLIONS) . 91
TABLE 26 FORECAST - ADVANCED DISPLAYS: COATED AREA BY
TYPE, THROUGH 2016 (MILLION M2). 92
FIGURE 9 FORECAST - ADVANCED DISPLAYS: COATED AREA
SHARE BY TYPE, 2016 (%) . 93
Mechanical/Chemical 93
TABLE 27 FORECAST – APPLICATIONS FOR PROTECTIVE
COATINGS: GLOBAL REVENUES, THROUGH 2016 ($ BILLIONS) 94
Energy 94
TABLE 28 FORECAST - PHOTOVOLTAIC MODULES: GLOBAL
PRODUCTION BY TYPE, THROUGH 2016 (MW) . 95
FIGURE 10 PHOTOVOLTAIC MODULES: PRODUCTION SHARE BY
TYPE, 2016 (%) . 95
FIGURE 10 (CONTINUED) 96
Other Industry Sectors 96
TECHNOLOGICAL TRENDS . 96
On-going Miniaturization in the Semiconductor Industry 96
TABLE 29 IC CONFIGURATIONS, 2009-2016 97
Thin, Ultrathin and Flexible Devices . 97
Roll-to-roll and Large Area Coatings 98
Merging of Thick and Thin Film Technologies . 98
Nanotechnology . 98
TABLE 30 THE NANOTECHNOLOGY INDUSTRY . 99
TABLE 30 (CONTINUED) 100
TABLE 31 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT,
THROUGH 2016 ($ BILLIONS) . 100
FIGURE 11 NANOTECHNOLOGY: GLOBAL MARKET SHARE BY
SEGMENT, 2011 (%) 101
Energy and Environmental Factors . 101
Others . 102
REGIONAL TRENDS 102
MARKET FORECAST 103
REVENUES BY APPLICATION . 103
TABLE 32 FORECAST – THIN FILM MATERIALS: GLOBAL
REVENUES BY APPLICATION, THROUGH 2016 ($ MILLIONS) 104
FIGURE 12 FORECAST – THIN FILM MATERIALS: MARKET SHARE
BY APPLICATION, 2016 (%) 104
FIGURE 12 (CONTINUED). 105
Revenues by Deposition Technology . 105
TABLE 33 FORECAST – THIN FILM MATERIALS: GLOBAL
REVENUES BY DEPOSITION TECHNOLOGY, THROUGH 2016 ($
MILLIONS) 106
FIGURE 13 FORECAST – THIN FILM MATERIALS: GLOBAL MARKET
SHARE BY DEPOSITION TECHNOLOGY, 2016 (%) 106
FIGURE 13 (CONTINUED). 107
Revenues by Film Thickness . 107
TABLE 34 FORECAST – THIN FILM MATERIALS: GLOBAL
REVENUES BY FILM THICKNESS, THROUGH 2016 ($ MILLIONS) . 107
Revenues by Region . 108
TABLE 35 FORECAST – THIN FILM MATERIALS: REVENUES BY
REGION, THROUGH 2016 ($ MILLIONS) . 108
FIGURE 14 FORECAST – THIN FILM MATERIALS: MARKET SHARE
BY REGION, 2016 (%) 109
CHAPTER SIX: ELECTRONICS . 110
OBJECTIVE 110
THIN FILMS FOR ELECTRONICS 110
TABLE 36 THIN FILMS IN ELECTRONICS, 2011 110
TABLE 36 (CONTINUED) . 111
TABLE 36 (CONTINUED) . 112
CURRENT MARKET BY APPLICATION . 112
TABLE 37 THIN FILM MATERIALS FOR ELECTRONICS: GLOBAL
REVENUES BY APPLICATION, 2011 ($ MILLIONS/%) . 113
ADDITIONAL INFORMATION ON INDUSTRY GROWTH . 113
PASSIVE COMPONENTS . 113
TABLE 38 FORECAST – PASSIVE COMPONENTS: GLOBAL
REVENUES BY TYPE, THROUGH 2016 ($ BILLIONS) 114
MEMS AND NEMS 114
TABLE 39 FORECAST – MEMS AND NEMS: GLOBAL REVENUES BY
TYPE, THROUGH 2016 ($ BILLIONS) . 115
OTHER APPLICATIONS 115
TABLE 40 FORECAST – OTHER APPLICATIONS IN ELECTRONICS:
GLOBAL REVENUES BY TYPE, THROUGH 2016 ($ BILLIONS) 115
RECENT INDUSTRY EVENTS AND DEVELOPMENTS . 116
THIN FILM MEMORY BY ROLL-TO-ROLL PRINTING . 116
SILICA/ALUMINA NANOLAMINATES AS LOW-K
DIELECTRIC 116
ULTRATHIN HIGH-PERMITTIVITY GATE INSULATING
FILM 117
SHAPE MEMORY ALLOY THIN FILMS FOR MEMS . 118
EMBEDDED THIN FILM PASSIVE COMPONENTS 118
MARKET SUMMARY AND FORECAST 119
REVENUES BY APPLICATION . 119
TABLE 41 FORECAST – THIN FILM MATERIALS FOR
ELECTRONICS: GLOBAL REVENUES BY APPLICATION,
THROUGH 2016 ($ MILLIONS) . 120
REVENUES BY DEPOSITION TECHNOLOGY . 121
TABLE 42 FORECAST – THIN FILM MATERIALS FOR
ELECTRONICS: GLOBAL REVENUES BY DEPOSITION
TECHNOLOGY, THROUGH 2016 ($ MILLIONS) 121
REVENUES BY FILM THICKNESS 122
TABLE 43 FORECAST – THIN FILM MATERIALS FOR
ELECTRONICS: GLOBAL REVENUES BY FILM THICKNESS,
THROUGH 2016 ($ MILLIONS) . 122
CHAPTER SEVEN: GLOBAL INDUSTRY STRUCTURE . 123
GLOBAL INDUSTRY STRUCTURE . 123
LEADING MANUFACTURERS OF THIN FILM MATERIALS 124
TABLE 44 LEADING MANUFACTURERS OF THIN FILM MATERIALS,
2011. 124
TABLE 44 (CONTINUED) . 125
TABLE 44 (CONTINUED) . 126
TABLE 44 (CONTINUED) 127
NOTABLE RECENT INDUSTRY CHANGES 128
TABLE 45 NOTABLE RECENT INDUSTRY CHANGES . 128
THIN FILM MATERIALS PRODUCTION BY REGION . 129
TABLE 46 THIN FILM MATERIALS: MANUFACTURING BY REGION,
2009-2016 (PERCENT OF SALES) 129
THIN FILM MATERIALS CONSUMPTION BY REGION 129
TABLE 47 THIN FILM MATERIALS: CONSUMPTION BY REGION,
2009-2016 (PERCENT OF SALES) 130
COMPANY PROFILES 130
AIR LIQUIDE . 131
AIR PRODUCTS AND CHEMICALS . 132
AKZO NOBEL 133
ATOTECH 134
BASF . 135
DAIDO STEEL . 136
DOW CHEMICAL 137
Dow Chemical (Continued) . 138
ENTHONE 139
HERAEUS 140
TABLE 48 HERAEUS TARGETS, 2011 . 141
HITACHI METALS 142
JOHNSON MATTHEY 143
JX NIPPON MINING & METALS 144
KOBE STEEL . 145
LINDE . 146
MACDERMID . 147
MATERION 147
TABLE 49 MATERION TECHNOLOGIES, 2011 148
MATSUDA SANGYO . 149
MERCK . 150
MITSUI MINING & SMELTING 150
PRAXAIR 151
Praxair (Continued) . 152
SAMSUNG CORNING PRECISION MATERIALS 153
Samsung Corning Precision Materials (Continued) 154
SUMITOMO METAL MINING . 155
TOSOH . 156
Tosoh (Continued) 157
ULVAC 158
TABLE 50 ULVAC SPUTTERING TARGETS, 2011 . 159
UMICORE 159
TABLE 51 UMICORE SPUTTERING TARGETS, 2011 160
CHAPTER EIGHT: U.S. PATENT ANALYSIS . 161
INTRODUCTION . 161
SUMMARY OF PATENTS AWARDED IN 2011. 161
TABLE 52 THIN AND ULTRATHIN FILMS, U.S. PATENTS, 2011 162
TABLE 52 (CONTINUED) . 163
TABLE 52 (CONTINUED) . 164
TABLE 52 (CONTINUED) . 165
TABLE 52 (CONTINUED) 166
TABLE 52 (CONTINUED) . 167
TABLE 52 (CONTINUED) . 168
TABLE 52 (CONTINUED) . 169
TABLE 52 (CONTINUED) . 170
TABLE 52 (CONTINUED) . 171
TABLE 52 (CONTINUED) . 172
TABLE 52 (CONTINUED) . 173
TABLE 52 (CONTINUED) . 174
TABLE 52 (CONTINUED) . 175
TABLE 52 (CONTINUED) . 176
TABLE 52 (CONTINUED) . 177
TABLE 52 (CONTINUED) . 178
TABLE 52 (CONTINUED) . 179
TABLE 52 (CONTINUED) . 180
TABLE 52 (CONTINUED) . 181
TABLE 52 (CONTINUED) 182
TABLE 52 (CONTINUED) . 183
TABLE 52 (CONTINUED) . 184
TABLE 52 (CONTINUED) . 185
TABLE 52 (CONTINUED) . 186
TABLE 52 (CONTINUED) . 187
TABLE 52 (CONTINUED) . 188
TABLE 52 (CONTINUED) . 189
TABLE 52 (CONTINUED) . 190
TABLE 52 (CONTINUED) . 191
TABLE 52 (CONTINUED) . 192
TABLE 52 (CONTINUED) . 193
TABLE 52 (CONTINUED) . 194
TABLE 52 (CONTINUED) . 195
TABLE 52 (CONTINUED) . 196
TABLE 52 (CONTINUED) . 197
TABLE 52 (CONTINUED) . 198
TABLE 52 (CONTINUED) . 199
TABLE 52 (CONTINUED) . 200
TABLE 52 (CONTINUED) . 201
TABLE 52 (CONTINUED) . 202
TABLE 52 (CONTINUED) . 203
TABLE 52 (CONTINUED) . 204
TABLE 52 (CONTINUED) 205
TABLE 52 (CONTINUED) . 206
TABLE 52 (CONTINUED) . 207
TABLE 52 (CONTINUED) . 208
TABLE 52 (CONTINUED) . 209
TABLE 52 (CONTINUED) . 210
TABLE 52 (CONTINUED) . 211
TABLE 52 (CONTINUED) . 212
GENERAL TRENDS. 213
TABLE 53 THIN AND ULTRATHIN FILMS: U.S. PATENT TRENDS,
THROUGH 2011 213
TRENDS BY COUNTRY AND REGION . 213
FIGURE 15 THIN AND ULTRATHIN FILMS: PATENT SHARE BY
REGION, 2011 (%) . 214
FIGURE 16 THIN AND ULTRATHIN FILMS: PATENT SHARE BY
COUNTRY, 2011 (%) 215
TRENDS BY ASSIGNEE . 216
TABLE 54 ASSIGNEES OF U.S. PATENTS RELATED TO THIN AND
ULTRATHIN FILMS, 2011 . 217
TABLE 54 (CONTINUED) . 218
TABLE 54 (CONTINUED) . 219
TABLE 54 (CONTINUED) . 220
TABLE 54 (CONTINUED) . 221
TABLE 54 (CONTINUED) . 222
TABLE 54 (CONTINUED) . 223
TABLE 54 (CONTINUED) . 224
TRENDS BY PATENT CATEGORY 225
FIGURE 17 THIN AND ULTRATHIN FILMS: SHARES OF U.S.
PATENTS BY CATEGORY, 2011 (%) 225
FIGURE 17 (CONTINUED). 226
TRENDS BY DEPOSITION METHOD . 226
FIGURE 18 THIN AND ULTRATHIN FILMS: SHARES OF U.S.
PATENTS BY DEPOSITION METHOD, 2011 (%) 227
